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Title: Detector and energy analyzer for energetic-hydrogen in beams and plasmas

Abstract

A detector for detecting energetic hydrogen ions and atoms ranging in energy from about 1 eV up to 1 keV in an evacuated environment includes a Schottky diode with a palladium or palladium-alloy gate metal applied to a silicon-dioxide layer on an n-silicon substrate. An array of the energetic-hydrogen detectors having a range of energy sensitivities form a plasma energy analyzer having a rapid response time and a sensitivity for measuring fluxes of energetic hydrogen. The detector is sensitive to hydrogen and its isotopes, but is insensitive to non-hydrogenic particles. The array of energetic-hydrogen detectors can be formed on a single silicon chip, with thin-film layers of gold metal applied in various thicknesses to successive detectors in the array. The gold layers serve as particle energy-filters so that each detector is sensitive to a different range of hydrogen energies.

Inventors:
; ;
Publication Date:
Research Org.:
Sandia National Labs., Albuquerque, NM (USA)
OSTI Identifier:
5998384
Patent Number(s):
4,782,302, None
Application Number:
06/925,590, ON: DE88000839
Assignee:
Dept. of Energy
DOE Contract Number:  
AC04-76DP00789
Resource Type:
Patent
Resource Relation:
Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 42 ENGINEERING; HYDROGEN IONS; SI SEMICONDUCTOR DETECTORS; HYDROGEN ISOTOPES; BEAM MONITORS; CHARGED PARTICLE DETECTION; ENERGY ANALYSIS; EV RANGE 01-10; EV RANGE 10-100; EV RANGE 100-1000; INVENTIONS; PALLADIUM; PATENTS; SILICON OXIDES; THERMONUCLEAR DEVICES; THIN FILMS; CHALCOGENIDES; CHARGED PARTICLES; DETECTION; DOCUMENT TYPES; ELEMENTS; ENERGY RANGE; EV RANGE; FILMS; IONS; ISOTOPES; MEASURING INSTRUMENTS; METALS; MONITORS; OXIDES; OXYGEN COMPOUNDS; PLATINUM METALS; RADIATION DETECTION; RADIATION DETECTORS; SEMICONDUCTOR DETECTORS; SILICON COMPOUNDS; TRANSITION ELEMENTS; 700102* - Fusion Energy- Plasma Research- Diagnostics; 420200 - Engineering- Facilities, Equipment, & Techniques

Citation Formats

Bastasz, R J, Hughes, R C, and Wampler, W R. Detector and energy analyzer for energetic-hydrogen in beams and plasmas. United States: N. p., 1986. Web.
Bastasz, R J, Hughes, R C, & Wampler, W R. Detector and energy analyzer for energetic-hydrogen in beams and plasmas. United States.
Bastasz, R J, Hughes, R C, and Wampler, W R. Fri . "Detector and energy analyzer for energetic-hydrogen in beams and plasmas". United States. https://www.osti.gov/servlets/purl/5998384.
@article{osti_5998384,
title = {Detector and energy analyzer for energetic-hydrogen in beams and plasmas},
author = {Bastasz, R J and Hughes, R C and Wampler, W R},
abstractNote = {A detector for detecting energetic hydrogen ions and atoms ranging in energy from about 1 eV up to 1 keV in an evacuated environment includes a Schottky diode with a palladium or palladium-alloy gate metal applied to a silicon-dioxide layer on an n-silicon substrate. An array of the energetic-hydrogen detectors having a range of energy sensitivities form a plasma energy analyzer having a rapid response time and a sensitivity for measuring fluxes of energetic hydrogen. The detector is sensitive to hydrogen and its isotopes, but is insensitive to non-hydrogenic particles. The array of energetic-hydrogen detectors can be formed on a single silicon chip, with thin-film layers of gold metal applied in various thicknesses to successive detectors in the array. The gold layers serve as particle energy-filters so that each detector is sensitive to a different range of hydrogen energies.},
doi = {},
url = {https://www.osti.gov/biblio/5998384}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1986},
month = {10}
}

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