Deposition and characterization of Li[sub 2]O-SiO[sub 2]-P[sub 2]O[sub 5] thin films
- Oak Ridge National Lab., Oak Ridge, TN (United States)
- Univ. of Kentucky, Lexington, KY (United States). Dept. of Chemistry
Amorphous lithium electrolyte thin films, xLi[sub 2]O[center dot]ySiO[sub 2][center dot]zP[sub 2]O[sub 5], were deposited by rf magnetron sputtering of pure and mixed-phase lithium silicate, lithium phosphate, SiO[sub 2], Li[sub 2]O, and Li[sub 2]CO[sub 3] targets, and their compositions were determined using proton-induced [gamma]-ray emission spectroscopy, energy-dispersive X-ray analysis, Rutherford backscattering spectrometry, and atomic-emission spectroscopy. The deposition conditions were chosen to assure thermalization of the sputtered flux, which proved to be necessary in order to obtain a homogeneous distribution of Si and P in the films. Optical absorption and ac impedance measurements showed that glass-in-glass phase separation occurred in a large SiO[sub 2]-rich domain of the composition diagram. In contrast to bulk glasses, all of the Li[sub 2]O-SiO[sub 2] films were phase-separated, including those with lithia contents larger than lithium disilicate. High-performance liquid chromatography measurements revealed that, analogous to bulk glasses, the addition of SiO[sub 2] to Li[sub 2]O-P[sub 2]O[sub 5] compositions reduced the number of phosphate anion dimers, trimers, and higher anion polymers in the films through the formation of -Si-O-P- bonds. However, in contrast to bulk glasses, the distribution of phosphate anion polymers followed closely the Flory distribution, with the fraction of anion polymers decreasing monotonically with increasing chain length.
- DOE Contract Number:
- AC05-84OR21400
- OSTI ID:
- 5992714
- Journal Information:
- Journal of the American Ceramic Society; (United States), Vol. 76:4; ISSN 0002-7820
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
LITHIUM OXIDES
PHYSICAL PROPERTIES
SPUTTERING
PHOSPHORUS OXIDES
SILICON OXIDES
AMORPHOUS STATE
ELECTRIC IMPEDANCE
EMISSION SPECTROSCOPY
EXPERIMENTAL DATA
GAMMA SPECTROSCOPY
GLASS
LIQUID COLUMN CHROMATOGRAPHY
LITHIUM PHOSPHATES
LITHIUM SILICATES
OPTICAL PROPERTIES
PHOSPHORUS
POLYMERS
RUTHERFORD SCATTERING
SILICON
SPATIAL DISTRIBUTION
THIN FILMS
VAPOR DEPOSITED COATINGS
X-RAY DIFFRACTOMETERS
ALKALI METAL COMPOUNDS
CHALCOGENIDES
CHROMATOGRAPHY
COATINGS
DATA
DIFFRACTOMETERS
DISTRIBUTION
ELASTIC SCATTERING
ELEMENTS
FILMS
IMPEDANCE
INFORMATION
LITHIUM COMPOUNDS
MEASURING INSTRUMENTS
NONMETALS
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHOSPHATES
PHOSPHORUS COMPOUNDS
SCATTERING
SEMIMETALS
SEPARATION PROCESSES
SILICATES
SILICON COMPOUNDS
SPECTROSCOPY
360601* - Other Materials- Preparation & Manufacture
360606 - Other Materials- Physical Properties- (1992-)