Transmission filter for the extreme ultraviolet spectral region composed of a thin Saran (C/sub 2/H/sub 2/Cl/sub 2/) foil

Journal Article · Mon May 15 00:00:00 EDT 1989 · Appl. Opt.; (United States)

DOI:https://doi.org/10.1364/AO.28.001818· OSTI ID:5988883

Seely, J F; Shirey, L; Kingman, A

Saran foils of 4000-A thickness have been fabricated and used astransmission filters in the extreme ultraviolet spectral region. Thetransmittances of the Saran foils were determined for the 20--620-Awavelength region. The foils transmitted radiation with wavelengths between the/ital L/ absorption edge of chlorine at 61.4 and /similar to/120 A.

• Research Organization: U. S. Naval Research Laboratory, E. O. Hulburt Center for Space Research Washington, DC 20375-5000(US); U. S. Naval Research Laboratory, Microelectronics Processing Facility Washington, DC 20375-5000
• OSTI ID: 5988883
• Journal Information: Appl. Opt.; (United States), Vol. 28:10
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
OPTICAL FILTERS
EXTREME ULTRAVIOLET RADIATION
FABRICATION
EXTREME ULTRAVIOLET SPECTRA
LIGHT TRANSMISSION
POLYVINYLS
SPECTROSCOPY
ELECTROMAGNETIC RADIATION
FILTERS
ORGANIC COMPOUNDS
ORGANIC POLYMERS
POLYMERS
RADIATIONS
SPECTRA
ULTRAVIOLET RADIATION
440300* - Miscellaneous Instruments- (-1989)