Low resistance Ohmic contacts to high-T/sub c/ superconducting thin films
Conference
·
· IEEE Trans. Magn.; (United States)
OSTI ID:5947871
Metal contacts to high T/sub c/ superconducting thin films have been studied. By analyzing the I-V characteristics at contact junctions and by synchrotron radiation photoemission spectroscopy, the effect of contact metal and surface treatments before depositing contact metal on the metal-superconductor interface characteristics has been investigated. Low resistance ohmic contacts are realized by the following sequence of processes: (1) oxygen ion sputter etching, (2) high-pressure oxygen plasma treatment, and (3) in-situ depositing Au with no interfacial reaction to the superconductor. A low contact resistivity equal to 5.5 x 10/sup -7/ Ohm.cm/sup 1/ at 77 K is realized experimentally.
- Research Organization:
- 9901600
- OSTI ID:
- 5947871
- Report Number(s):
- CONF-880812-; TRN: 89-018597
- Journal Information:
- IEEE Trans. Magn.; (United States), Vol. 25:2; Conference: Applied superconductivity conference, San Francisco, CA, USA, 21-25 Aug 1988
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
SUPERCONDUCTING FILMS
SPUTTERING
ELECTRIC IMPEDANCE
ETCHING
EXPERIMENTAL DATA
HIGH PRESSURE
HIGH TEMPERATURE
INTERFACES
OXYGEN
PHOTOEMISSION
SOLID-STATE PLASMA
SUPERCONDUCTING JUNCTIONS
SYNCHROTRON RADIATION
BREMSSTRAHLUNG
DATA
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION
FILMS
IMPEDANCE
INFORMATION
JUNCTIONS
NONMETALS
NUMERICAL DATA
PLASMA
RADIATIONS
SECONDARY EMISSION
SURFACE FINISHING
420201* - Engineering- Cryogenic Equipment & Devices
656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)
656100 - Condensed Matter Physics- Superconductivity
GENERAL PHYSICS
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
SUPERCONDUCTING FILMS
SPUTTERING
ELECTRIC IMPEDANCE
ETCHING
EXPERIMENTAL DATA
HIGH PRESSURE
HIGH TEMPERATURE
INTERFACES
OXYGEN
PHOTOEMISSION
SOLID-STATE PLASMA
SUPERCONDUCTING JUNCTIONS
SYNCHROTRON RADIATION
BREMSSTRAHLUNG
DATA
ELECTROMAGNETIC RADIATION
ELEMENTS
EMISSION
FILMS
IMPEDANCE
INFORMATION
JUNCTIONS
NONMETALS
NUMERICAL DATA
PLASMA
RADIATIONS
SECONDARY EMISSION
SURFACE FINISHING
420201* - Engineering- Cryogenic Equipment & Devices
656003 - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)
656100 - Condensed Matter Physics- Superconductivity