Nondestructive testing for microelectronics, semiconductors, and superconductors. (Latest citations from the NTIS bibliographic database). Published Search

Technical Report · Wed Sep 01 00:00:00 EDT 1993

OSTI ID:5927586

The bibliography contains citations concerning the theory and various techniques for nondestructive testing or examination of microelectronic devices, semiconductor devices, and superconductors for the detection of flaws or defects which affect their properties and behavior. Some attention is also given to uniformity and quality control in integrated circuit manufacturing. (Contains a minimum of 161 citations and includes a subject term index and title list.)

• Research Organization: NERAC, Inc., Tolland, CT (United States)
• OSTI ID: 5927586
• Report Number(s): PB-93-890010/XAB
• Resource Relation: Other Information: Updated with each order. Supersedes PB--89-861215
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
MICROELECTRONICS
NONDESTRUCTIVE TESTING
SEMICONDUCTOR DEVICES
SUPERCONDUCTING DEVICES
BIBLIOGRAPHIES
DEFECTS
INSPECTION
INTEGRATED CIRCUITS
MANUFACTURING
QUALITY CONTROL
CONTROL
DOCUMENT TYPES
ELECTRONIC CIRCUITS
MATERIALS TESTING
MICROELECTRONIC CIRCUITS
TESTING
426000* - Engineering- Components
Electron Devices & Circuits- (1990-)
420500 - Engineering- Materials Testing