Development of damage resistant sputtered oxide optical coatings for use at 248 NM

Pawlewicz, W T; Martin, P M; Hays, D D; Mann, I B

doi:10.2172/5922065

Title: Development of damage resistant sputtered oxide optical coatings for use at 248 NM

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Abstract

This report summarizes the results of a six-month effort to develop damage-resistant Kr*F laser mirrors by using and refining reactive sputter deposition techniques for the fabricaton of multilayer oxide optical coatings. Mirror performance goals included a reflectivity of 99% at 248 nm and a laser damage threshold of 5 J/cm/sup 2/ for 20 ns pulses. Oxide multilayer coating combinations selected for development were SiO/sub 2//Al/sub 2/O/sub 3/, SiO/sub 2//HfO/sub 2/ and SiO/sub 2//Y/sub 2/O/sub 3/. Selection was based on review and compilation of the optical properties of oxide materials reported in the recent literature. Twenty-eight coatings of selected designs were fabricated on LLNL substrates for laser damage testing by LLNL. Forty other coatings were fabricated on PNL substrates for optical, microstructural and topographical characterization by PNL aimed at optimization of their performance. Specimens for damage testing consisted of single layers of Al/sub 2/O/sub 3/, HfO/sub 2/ and Y/sub 2/O/sub 3/ in thicknesses of lambda/2, 3lambda/2 and 2lambda at 248 nm plus high reflectors of the design LL (HL)/sup m/ HLL.

Authors:: Pawlewicz, W T; Martin, P M; Hays, D D; Mann, I B

Publication Date:: Thu Oct 01 00:00:00 EDT 1981

Research Org.:: Pacific Northwest National Lab. (PNNL), Richland, WA (United States)

OSTI Identifier:: 5922065

Report Number(s):: PNL-3869
ON: DE82003525; TRN: 82-001548

DOE Contract Number:: AC06-76RL01830

Resource Type:: Technical Report

Country of Publication:: United States

Language:: English

Subject:: 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; 36 MATERIALS SCIENCE; ALUMINIUM OXIDES; OPTICAL PROPERTIES; CHEMICAL LASERS; OPTICAL SYSTEMS; HAFNIUM OXIDES; LASER MIRRORS; COATINGS; SILICON OXIDES; YTTRIUM OXIDES; EXPERIMENTAL DATA; KRYPTON FLUORIDES; MICROSTRUCTURE; PERFORMANCE TESTING; PHYSICAL RADIATION EFFECTS; SUBSTRATES; ALUMINIUM COMPOUNDS; CHALCOGENIDES; CRYSTAL STRUCTURE; DATA; FLUORIDES; FLUORINE COMPOUNDS; HAFNIUM COMPOUNDS; HALIDES; HALOGEN COMPOUNDS; INFORMATION; KRYPTON COMPOUNDS; LASERS; MIRRORS; NUMERICAL DATA; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RADIATION EFFECTS; RARE GAS COMPOUNDS; SILICON COMPOUNDS; TESTING; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS; 700209* - Fusion Power Plant Technology- Component Development & Materials Testing; 700208 - Fusion Power Plant Technology- Inertial Confinement Technology; 360204 - Ceramics, Cermets, & Refractories- Physical Properties

Citation Formats


                    Pawlewicz, W T, Martin, P M, Hays, D D, and Mann, I B. Development of damage resistant sputtered oxide optical coatings for use at 248 NM.  United States: N. p., 1981. 
        Web.  doi:10.2172/5922065.

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                    Pawlewicz, W T, Martin, P M, Hays, D D, & Mann, I B. Development of damage resistant sputtered oxide optical coatings for use at 248 NM.  United States.  https://doi.org/10.2172/5922065

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                    Pawlewicz, W T, Martin, P M, Hays, D D, and Mann, I B. 1981.  
        "Development of damage resistant sputtered oxide optical coatings for use at 248 NM".  United States.  https://doi.org/10.2172/5922065.  https://www.osti.gov/servlets/purl/5922065.

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@article{osti_5922065,

  title        = {Development of damage resistant sputtered oxide optical coatings for use at 248 NM},

  author       = {Pawlewicz, W T and Martin, P M and Hays, D D and Mann, I B},

  abstractNote = {This report summarizes the results of a six-month effort to develop damage-resistant Kr*F laser mirrors by using and refining reactive sputter deposition techniques for the fabricaton of multilayer oxide optical coatings. Mirror performance goals included a reflectivity of 99% at 248 nm and a laser damage threshold of 5 J/cm/sup 2/ for 20 ns pulses. Oxide multilayer coating combinations selected for development were SiO/sub 2//Al/sub 2/O/sub 3/, SiO/sub 2//HfO/sub 2/ and SiO/sub 2//Y/sub 2/O/sub 3/. Selection was based on review and compilation of the optical properties of oxide materials reported in the recent literature. Twenty-eight coatings of selected designs were fabricated on LLNL substrates for laser damage testing by LLNL. Forty other coatings were fabricated on PNL substrates for optical, microstructural and topographical characterization by PNL aimed at optimization of their performance. Specimens for damage testing consisted of single layers of Al/sub 2/O/sub 3/, HfO/sub 2/ and Y/sub 2/O/sub 3/ in thicknesses of lambda/2, 3lambda/2 and 2lambda at 248 nm plus high reflectors of the design LL (HL)/sup m/ HLL.},

  doi          = {10.2172/5922065},

  url          = {https://www.osti.gov/biblio/5922065},
  journal      = {},
number       = ,

  volume       = ,

  place        = {United States},

  year         = {Thu Oct 01 00:00:00 EDT 1981},

  month        = {Thu Oct 01 00:00:00 EDT 1981}

}

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