Process for forming thin film, heat treatment process of thin film sheet, and heat treatment apparatus therefor
The invention provides a process for forming a magnetic thin film on a base film, a heat treatment process of a thin film sheet consisting of the base film and the magnetic thin film, and an apparatus for performing heat treatment of the thin film sheet. Tension applied to the thin film sheet is substantially equal to that applied to the base film when the magnetic thin film is formed thereon. Then, the thin film sheet is treated with heat. The thin film sheet is heated with a given temperature gradient to a reactive temperature at which heat shrinkage occurs, while the tension is being applied thereto. Thereafter, the thin film sheet to which the tension is still applied is cooled with substantially the same temperature gradient as applied in heating. The heat treatment apparatus has a film driving unit including a supply reel, a take-up reel, a drive source and guide rollers; a heating unit including heating plates, heater blocks and a temperature controller for heating the sheet to the reactive temperature; and a heat insulating unit including a thermostat and another temperature controller for maintaining the sheet at the nonreactive temperature which is slightly lower than the reactive temperature.
- Assignee:
- EDB-85-079382
- Patent Number(s):
- US 4489124
- Application Number:
- TRN: 85-011666
- OSTI ID:
- 5912369
- Resource Relation:
- Patent Priority Date: Priority date 30 Mar 1982, Japan; Other Information: PAT-APPL-363441
- Country of Publication:
- United States
- Language:
- English
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