Model of diffusion of ion-implanted impurities, taking into account the effect of radiation defects created by ion implantation on the diffusion process
Radiation defects created during implantation appreciably affect the process of redistribution of impurities during subsequent heat treatments. The development of models of diffusion of ion-implanted impurities, taking into account radiation defects, will substantially increase the adequacy of the modeling of doping processes at the design stage and at the stage of testing of modern semiconductor device and IMS technology. The authors propose such a model. For the model, the authors studied the diffusion of boron, gallium, arsenic, and antimony implanted in silicon. Thermal diffusion of these impurities is described under the assumption that the neutral and singly charged equilibrium vacancy-impurity complexes (VIC), formed correspondingly by singly charged and neutral vacancies and impurity atoms at the position of substitution, migrate. It is assumed that the different charge states of the vacancies and vacancy-impurity complexes as well as the impurity atoms, vacancies, and VIC are in local thermodynamic equilibrium.
- Research Organization:
- Minsk Radio Engineering Institute, USSR
- OSTI ID:
- 5894843
- Journal Information:
- Sov. Microelectron.; (United States), Vol. 14:6; Other Information: Translated from Mikroelektronika Akad. Nauk SSSR; 14: No. 6, 542-547(Nov-Dec 1985)
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ANTIMONY
THERMAL DIFFUSION
ARSENIC
BORON
GALLIUM
SILICON
CRYSTAL MODELS
ION IMPLANTATION
PHYSICAL RADIATION EFFECTS
TEMPERATURE EFFECTS
VACANCIES
ANTIMONY IONS
ARSENIC IONS
BORON IONS
CARRIER DENSITY
CONSERVATION LAWS
ELECTRONS
GALLIUM IONS
HEAT TREATMENTS
HOLES
ION BEAMS
LTE
METALLURGICAL EFFECTS
BEAMS
CHARGED PARTICLES
CRYSTAL DEFECTS
CRYSTAL STRUCTURE
DIFFUSION
ELEMENTARY PARTICLES
ELEMENTS
EQUILIBRIUM
FERMIONS
IONS
LEPTONS
MATHEMATICAL MODELS
METALS
POINT DEFECTS
RADIATION EFFECTS
SEMIMETALS
360106* - Metals & Alloys- Radiation Effects
360102 - Metals & Alloys- Structure & Phase Studies
360104 - Metals & Alloys- Physical Properties