Schottky contacts on chemically etched p- and n-type indium phosphide
Journal Article
·
· Appl. Phys. Lett.; (United States)
The Schottky-barrier energy phi/sub B/ for Al, Ni, Co, Pd, Au, and Ag contacts on chemically etched <100> surfaces of both p- and n-type InP were measured and the metallurgical behavior of the contact structures were studied using Auger electron spectroscopy. phi/sub B/ was found to be a function of the chemical reactivity of the contact metal with the InP substrate. Extensive outdiffusion of In was observed in the Au and Ag contacts. The results indicate that the chemical effects at the metal-semiconductor interface are a determining factor in the formation of InP Schottky barriers.
- Research Organization:
- Department of Electrical Engineering, University of Minnesota, Minneapolis, Minnesota 55455
- DOE Contract Number:
- EY-76-8-02-2952
- OSTI ID:
- 5883130
- Journal Information:
- Appl. Phys. Lett.; (United States), Vol. 40:5
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
ELECTRIC CONTACTS
SCHOTTKY BARRIER DIODES
ALUMINIUM
AUGER ELECTRON SPECTROSCOPY
CHEMICAL REACTIONS
COBALT
CRYSTAL LATTICES
ETCHING
GOLD
INDIUM PHOSPHIDES
MATHEMATICAL MODELS
METALLURGY
N-TYPE CONDUCTORS
NICKEL
P-TYPE CONDUCTORS
PALLADIUM
POTENTIALS
SILVER
CRYSTAL STRUCTURE
ELECTRICAL EQUIPMENT
ELECTRON SPECTROSCOPY
ELEMENTS
EQUIPMENT
INDIUM COMPOUNDS
MATERIALS
METALS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PLATINUM METALS
PNICTIDES
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SEMICONDUCTOR MATERIALS
SPECTROSCOPY
SURFACE FINISHING
TRANSITION ELEMENTS
420800* - Engineering- Electronic Circuits & Devices- (-1989)
ELECTRIC CONTACTS
SCHOTTKY BARRIER DIODES
ALUMINIUM
AUGER ELECTRON SPECTROSCOPY
CHEMICAL REACTIONS
COBALT
CRYSTAL LATTICES
ETCHING
GOLD
INDIUM PHOSPHIDES
MATHEMATICAL MODELS
METALLURGY
N-TYPE CONDUCTORS
NICKEL
P-TYPE CONDUCTORS
PALLADIUM
POTENTIALS
SILVER
CRYSTAL STRUCTURE
ELECTRICAL EQUIPMENT
ELECTRON SPECTROSCOPY
ELEMENTS
EQUIPMENT
INDIUM COMPOUNDS
MATERIALS
METALS
PHOSPHIDES
PHOSPHORUS COMPOUNDS
PLATINUM METALS
PNICTIDES
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SEMICONDUCTOR MATERIALS
SPECTROSCOPY
SURFACE FINISHING
TRANSITION ELEMENTS
420800* - Engineering- Electronic Circuits & Devices- (-1989)