Design and characteristics of high pulse repetition rate and high average power excimer laser systems

Journal Article · Tue Oct 01 00:00:00 EDT 1991 · IEEE Journal of Quantum Electronics (Institute of Electrical and Electronics Engineers); (United States)

DOI:https://doi.org/10.1109/3.97278· OSTI ID:5869159

Sentis, M L; Delaporte, P; Forestier, B M; Fontaine, B L ^[1]

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1. Inst. de Mecanique des Fluides de Marseille, UM 34 CRNS, Univ. d'Aix-Marseille, 13003 Marseille (FR)

This paper describes the design and the performance characteristics of an X-ray preionized discharge pumped XeCl laser system operated at very high repetition rate frequency and high average power (200 W). The laser system is mainly composed of a fast flow subsonic closed cycle wind tunnel, a laser head, a high average power electrical excitation system, and an X-ray preionization source. The laser head design and the dumping of acoustic waves induced by fast electrical energy deposition of 50 J/L bar allow this device to be operated at repetition rate frequencies of up to {approx}1700 Hz.

• OSTI ID: 5869159
• Journal Information: IEEE Journal of Quantum Electronics (Institute of Electrical and Electronics Engineers); (United States), Vol. 27:10; ISSN 0018-9197
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
EXCIMER LASERS
DESIGN
PERFORMANCE
ELECTRIC DISCHARGES
IONIZATION
KHZ RANGE 01-100
POWER
PULSES
SOUND WAVES
SUBSONIC FLOW
WIND TUNNELS
X RADIATION
ELECTROMAGNETIC RADIATION
FLUID FLOW
FREQUENCY RANGE
GAS LASERS
IONIZING RADIATIONS
KHZ RANGE
LASERS
RADIATIONS
TUNNELS
UNDERGROUND FACILITIES
426002* - Engineering- Lasers & Masers- (1990-)