Layered ultra-thin coherent structures used as electrical resistors having low temperature coefficient of resistivity

Patent · Tue Jun 12 00:00:00 EDT 1984

OSTI ID:5865596

Werner, T R; Falco, C M; Schuller, I K

A thin film resistor having a controlled temperature coefficient of resistance (TCR) ranging from negative to positive degrees kelvin and having relatively high resistivity. The resistor is a multilayer superlattice crystal containing a plurality of alternating, ultra-thin layers of two different metals. TCR is varied by controlling the thickness of the individual layers. The resistor can be readily prepared by methods compatible with thin film circuitry manufacturing techniques.

• Assignee: Dept. of Energy
• Patent Number(s): US 4454495
• OSTI ID: 5865596
• Resource Relation: Patent File Date: Filed date 31 Aug 1982; Other Information: PAT-APPL-413637
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
SEMICONDUCTOR RESISTORS
FABRICATION
TEMPERATURE EFFECTS
CRYSTAL LATTICES
ELECTRIC CONDUCTIVITY
LAYERS
THICKNESS
THIN FILMS
CRYSTAL STRUCTURE
DIMENSIONS
ELECTRICAL EQUIPMENT
ELECTRICAL PROPERTIES
EQUIPMENT
FILMS
PHYSICAL PROPERTIES
RESISTORS
SEMICONDUCTOR DEVICES
420800* - Engineering- Electronic Circuits & Devices- (-1989)