Commercial-scale production of high-temperature superconductors. Annual report, 15 Sep 90-15 Sep 91
Thin films of YBa2Cu3O(7-x) were deposited onto substrates of up to three inch diameter by RF planar magnetron sputtering from an 8 inch diameter Y-Ba-Cu-O target. By locating the substrate above the center of the magnetron erosion ring and by placing a 'negative ion shield' between the substrate and the target, negative ion effects are avoided. A large area, backside radiant heater brings the bare substrates up to the temperatures necessary for in situ growth of superconducting YBa2Cu3O(7-x) films. The YBCO sputter deposition is completely automated and a throughput of 10 two inch diameters per week from a single target is easily achieved. YBCO films have been grown on MgO and LaAlO3 substrates with critical temperature > or = 90 K, change of temperature < 1 K, and critical current density > 1 million A/sq cm at 77 K. Microwave resistance for YBCO films on two inch diameter LaAlO3 substrates has been measured and found to be < 0.62 milliohms with a uniformity of better than + or - 5%. On two inch diameter substrates, uniformity of thickness and room temperature resistivity of < 7% have been achieved. The compositional uniformity of Y, Ba, and Cu across a two inch diameter substrate was found to be better than + or - 1%. Preliminary work on the growth of Y-ZrO2 dielectric layers and epitaxial YBCO/PLZT bilayers has been initiated.
- Research Organization:
- CVC Products, Inc., Rochester, NY (United States)
- OSTI ID:
- 5835262
- Report Number(s):
- AD-A-244355/4/XAB; CNN: N00014-90-c-0206
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
BARIUM OXIDES
DEPOSITION
SUPERCONDUCTIVITY
COPPER OXIDES
SUPERCONDUCTING FILMS
YTTRIUM OXIDES
ELECTRIC CONDUCTIVITY
HIGH-TC SUPERCONDUCTORS
MAGNESIUM OXIDES
MAGNETRONS
PRODUCTION
SPUTTERING
SUBSTRATES
SUPERCONDUCTING JUNCTIONS
TEMPERATURE RANGE 0065-0273 K
THICKNESS
TRANSITION TEMPERATURE
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COPPER COMPOUNDS
DIMENSIONS
ELECTRICAL PROPERTIES
ELECTRON TUBES
ELECTRONIC EQUIPMENT
EQUIPMENT
FILMS
JUNCTIONS
MAGNESIUM COMPOUNDS
MICROWAVE EQUIPMENT
MICROWAVE TUBES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SUPERCONDUCTORS
TEMPERATURE RANGE
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360207 - Ceramics
Cermets
& Refractories- Superconducting Properties- (1992-)