Sputtering from a liquid phase Ga-In eutectic alloy
Sputtering experiments were performed with a liquid-phase Ga-In eutectic alloy target. The bulk composition of the eutectic alloy is 16.5 at% In, but thermodynamic surface-segregation results in a surface monolayer of >94 at% In. Angular distributions and partial sputtering yields were measured for 3, 25, and 50 keV Ar{sup +} bombardment. Comparison of the sputtered-flux composition with the alloy surface composition profile allowed calculation of the fraction of sputtered atoms originating from the first atomic layer. The result was found to be {approx}0.87 {plus minus} {sup 0.05}{sub 0.03} at 25 and 50 keV, and increased to 0.94 {plus minus} {sup 0.06}{sub 0.04} at 3 keV. The increase may reflect a decrease in the average energy of recoil atoms within collision cascades, because fewer second layer recoil atoms would be able to penetrate the surface layer. Low-energy (4-6 eV) secondary-ion mass spectra were measured for Ne{sup +}, Ar{sup +}, Kr{sup +}, and Xe{sup +} bombardment in the energy range of 25-250 keV. The intensity ratio I(In{sup +})/I(Ga{sup +}) was found to be independent of projectile energy, as expected from the collision cascade theory of sputtering. However, a systematic increase, of {approx}25%, was observed as the projectile mass was increased from that of Ne to that of Xe. This was estimated to correspond to an increase of 5% in the fraction of sputtered atoms originating from the first atomic layer. Molecular/atomic ion yield ratios were measured for 25-250 keV Ne{sup +}, Ar{sup +}, Kr{sup +}, and Xe{sup +} bombardment of Ga and In elemental standards, and were found to be nearly independent of both projectile energy and mass. A published theory based on the recombination of independently sputtered neutral constituents predicts a relative yield proportional to the sputtering yield.
- Research Organization:
- Yale Univ., New Haven, CT (USA)
- OSTI ID:
- 5818554
- Resource Relation:
- Other Information: Thesis (Ph. D.)
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON IONS
COLLISIONS
GALLIUM ALLOYS
SPUTTERING
INDIUM ALLOYS
KRYPTON IONS
NEON IONS
XENON IONS
ANGULAR DISTRIBUTION
BINARY ALLOY SYSTEMS
CATIONS
COMPARATIVE EVALUATIONS
KEV RANGE 01-10
KEV RANGE 10-100
KEV RANGE 100-1000
LIQUID METALS
MASS SPECTRA
ALLOY SYSTEMS
ALLOYS
CHARGED PARTICLES
DISTRIBUTION
ELEMENTS
ENERGY RANGE
FLUIDS
IONS
KEV RANGE
LIQUIDS
METALS
SPECTRA
656003* - Condensed Matter Physics- Interactions between Beams & Condensed Matter- (1987-)