Time resolved reflectivity measurements in Pb-implanted SrTiO/sub 3/

Conference · Thu Jun 01 00:00:00 EDT 1989

OSTI ID:5777817

McCallum, J C; Rankin, J; White, C W; Boatner, L A

Time resolved optical reflectivity (TRR) is a simple and elegant technique for dynamically monitoring the interface motion that occurs during crystallization of thin films and amorphous layers on crystalline substrates. This in situ technique has enabled measurements of the solid-phase epitaxial regrowth rate of amorphous silicon layers produced by ion implantation to be extended by over five orders of magnitude to rates in excess of 10/sup 6/ /angstrom//s. TRR is also well suited to measurements of crystallization kinetics in ion-implanted ceramic oxides. In the present work, the technique is used to directly monitor the regrowth during thermal annealing of amorphous layers produced by ion implantation in the crystalline ceramic oxide SrTiO/sub 3/. In particular, the effect of ambient water vapour on the epitaxial regrowth rate of amorphous layers in these materials has been examined. This study provides new insight into the role of water in regrowth of materials of this nature and clearly illustrates the utility of TRR in measurements of crystallization rates in ceramic oxides. 11 refs., 5 figs.

• Research Organization: Oak Ridge National Lab., TN (USA)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 5777817
• Report Number(s): CONF-8906155-4; ON: DE89016234
• Resource Relation: Conference: Radiation effects in insulators-5: crystalline oxides and ceramics session, Hamilton, Canada, 19-23 Jun 1989; Other Information: Portions of this document are illegible in microfiche products
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
STRONTIUM OXIDES
RECRYSTALLIZATION
TITANIUM OXIDES
AMORPHOUS STATE
ION IMPLANTATION
LEAD IONS
NITROGEN
REFLECTIVITY
TEMPERATURE DEPENDENCE
THIN FILMS
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
CHARGED PARTICLES
ELEMENTS
FILMS
IONS
NONMETALS
OPTICAL PROPERTIES
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
STRONTIUM COMPOUNDS
SURFACE PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
360202* - Ceramics
Cermets
& Refractories- Structure & Phase Studies