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Title: Time resolved reflectivity measurements in Pb-implanted SrTiO/sub 3/

Abstract

Time resolved optical reflectivity (TRR) is a simple and elegant technique for dynamically monitoring the interface motion that occurs during crystallization of thin films and amorphous layers on crystalline substrates. This in situ technique has enabled measurements of the solid-phase epitaxial regrowth rate of amorphous silicon layers produced by ion implantation to be extended by over five orders of magnitude to rates in excess of 10/sup 6/ /angstrom//s. TRR is also well suited to measurements of crystallization kinetics in ion-implanted ceramic oxides. In the present work, the technique is used to directly monitor the regrowth during thermal annealing of amorphous layers produced by ion implantation in the crystalline ceramic oxide SrTiO/sub 3/. In particular, the effect of ambient water vapour on the epitaxial regrowth rate of amorphous layers in these materials has been examined. This study provides new insight into the role of water in regrowth of materials of this nature and clearly illustrates the utility of TRR in measurements of crystallization rates in ceramic oxides. 11 refs., 5 figs.

Authors:
; ; ;
Publication Date:
Research Org.:
Oak Ridge National Lab., TN (USA)
OSTI Identifier:
5777817
Report Number(s):
CONF-8906155-4
ON: DE89016234
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Conference
Resource Relation:
Conference: Radiation effects in insulators-5: crystalline oxides and ceramics session, Hamilton, Canada, 19-23 Jun 1989; Other Information: Portions of this document are illegible in microfiche products
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; STRONTIUM OXIDES; RECRYSTALLIZATION; TITANIUM OXIDES; AMORPHOUS STATE; ION IMPLANTATION; LEAD IONS; NITROGEN; REFLECTIVITY; TEMPERATURE DEPENDENCE; THIN FILMS; ALKALINE EARTH METAL COMPOUNDS; CHALCOGENIDES; CHARGED PARTICLES; ELEMENTS; FILMS; IONS; NONMETALS; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; STRONTIUM COMPOUNDS; SURFACE PROPERTIES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS; 360202* - Ceramics, Cermets, & Refractories- Structure & Phase Studies

Citation Formats

McCallum, J C, Rankin, J, White, C W, and Boatner, L A. Time resolved reflectivity measurements in Pb-implanted SrTiO/sub 3/. United States: N. p., 1989. Web.
McCallum, J C, Rankin, J, White, C W, & Boatner, L A. Time resolved reflectivity measurements in Pb-implanted SrTiO/sub 3/. United States.
McCallum, J C, Rankin, J, White, C W, and Boatner, L A. Thu . "Time resolved reflectivity measurements in Pb-implanted SrTiO/sub 3/". United States. https://www.osti.gov/servlets/purl/5777817.
@article{osti_5777817,
title = {Time resolved reflectivity measurements in Pb-implanted SrTiO/sub 3/},
author = {McCallum, J C and Rankin, J and White, C W and Boatner, L A},
abstractNote = {Time resolved optical reflectivity (TRR) is a simple and elegant technique for dynamically monitoring the interface motion that occurs during crystallization of thin films and amorphous layers on crystalline substrates. This in situ technique has enabled measurements of the solid-phase epitaxial regrowth rate of amorphous silicon layers produced by ion implantation to be extended by over five orders of magnitude to rates in excess of 10/sup 6/ /angstrom//s. TRR is also well suited to measurements of crystallization kinetics in ion-implanted ceramic oxides. In the present work, the technique is used to directly monitor the regrowth during thermal annealing of amorphous layers produced by ion implantation in the crystalline ceramic oxide SrTiO/sub 3/. In particular, the effect of ambient water vapour on the epitaxial regrowth rate of amorphous layers in these materials has been examined. This study provides new insight into the role of water in regrowth of materials of this nature and clearly illustrates the utility of TRR in measurements of crystallization rates in ceramic oxides. 11 refs., 5 figs.},
doi = {},
url = {https://www.osti.gov/biblio/5777817}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1989},
month = {6}
}

Conference:
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