Electron acoustic waves in capacitively coupled, low-pressure rf glow discharges
Journal Article
·
· Physical Review Letters; (USA)
- Department of Chemical Engineering, University of California, Berkeley, Berkeley, California 94720 (US)
Particle-in-cell Monte Carlo simulations of rf glow discharges between parallel-plate electrodes reveal the possibility of negative period-averaged power deposited into electrons in the body of the glow. A two-fluid model of fast- and slow-electron transport demonstrates that fast electrons are compressed at the plasma-sheath boundary by the expanding sheath and are rarefied at the other (collapsing) sheath, resulting in a fast-electron density gradient through the plasma. The resulting electron acoustic waves are the key to understanding electron cooling in the body of the glow.
- OSTI ID:
- 5755057
- Journal Information:
- Physical Review Letters; (USA), Vol. 66:11; ISSN 0031-9007
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
HIGH-FREQUENCY DISCHARGES
ELECTRIC CONDUCTIVITY
PLASMA SHEATH
SOUND WAVES
BOUNDARY LAYERS
CAPACITANCE
COMPRESSIBILITY
COUPLING
CROSS SECTIONS
ELASTIC SCATTERING
ELECTRODES
ELECTRON DENSITY
ELECTRONS
MONTE CARLO METHOD
PLASMA EXPANSION
PLATES
PRESSURE DEPENDENCE
SIMULATION
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELEMENTARY PARTICLES
EXPANSION
FERMIONS
LAYERS
LEPTONS
MECHANICAL PROPERTIES
PHYSICAL PROPERTIES
SCATTERING
640410* - Fluid Physics- General Fluid Dynamics
SUPERCONDUCTIVITY AND SUPERFLUIDITY
HIGH-FREQUENCY DISCHARGES
ELECTRIC CONDUCTIVITY
PLASMA SHEATH
SOUND WAVES
BOUNDARY LAYERS
CAPACITANCE
COMPRESSIBILITY
COUPLING
CROSS SECTIONS
ELASTIC SCATTERING
ELECTRODES
ELECTRON DENSITY
ELECTRONS
MONTE CARLO METHOD
PLASMA EXPANSION
PLATES
PRESSURE DEPENDENCE
SIMULATION
ELECTRIC DISCHARGES
ELECTRICAL PROPERTIES
ELEMENTARY PARTICLES
EXPANSION
FERMIONS
LAYERS
LEPTONS
MECHANICAL PROPERTIES
PHYSICAL PROPERTIES
SCATTERING
640410* - Fluid Physics- General Fluid Dynamics