Direct-laser writing of silicon microstructures: Raman microprobe diagnostics and modeling of the nucleation phase of deposition

Journal Article · Thu May 01 00:00:00 EDT 1986 · J. Vac. Sci. Technol., A; (United States)

DOI:https://doi.org/10.1116/1.573824· OSTI ID:5754726

Herman, I P; Magnotta, F; Kotecki, D E

Two topics vital to the analysis and applications of direct-laser writing of silicon microstructures are addressed here: optical diagnostics and modeling. The use of real-time and postprocessing Raman microprobe analysis of laser-written doped polysilicon microstructures on CMOS gate arrays is shown to be a useful diagnostic tool. Also, the results of a Monte Carlo simulation of adatom migration and desorption are applied to the study of nucleation effects in direct-laser writing, with specific reference to the deposition of silicon.

• Research Organization: Department of Physics, University of California, Lawrence Livermore National Laboratory, Livermore, California 94550
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 5754726
• Journal Information: J. Vac. Sci. Technol., A; (United States), Vol. 4:3
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
SILICON
DEPOSITION
LASER RADIATION
MICROSTRUCTURE
RAMAN SPECTROSCOPY
CRYSTAL STRUCTURE
ELECTROMAGNETIC RADIATION
ELEMENTS
LASER SPECTROSCOPY
RADIATIONS
SEMIMETALS
SPECTROSCOPY
360601* - Other Materials- Preparation & Manufacture
360602 - Other Materials- Structure & Phase Studies
420800 - Engineering- Electronic Circuits & Devices- (-1989)