Method of making a Josephson junction with a diamond-like carbon insulating barrier

Patent · Tue Nov 12 00:00:00 EST 1991

OSTI ID:5746661

Hed, A Z

This patent describes a method of making a Josephson junction. It comprises depositing upon a substrate a first layer of high-temperature superconductive oxide having a critical temperature above 23 K.; depositing on the first layer to a thickness in excess of 200 angstroms an insulating layer of diamond-like carbon resistant to cation diffusion therethrough and incapable of interdiffusing with superconductive oxides of the junction; plasma etching the insulating layer to leave the insulating layer with a thickness of 20 to 100 angstroms on the first layer; to leave a continuous film thereof on the first layer of a thickness of 20 to 100 angstroms; and depositing on the insulating layer a second layer of high-temperature superconductive oxide having a critical temperature above 23 K. and forming with the first layer and the insulating layer a Josephson junction at a temperature at least equal to one of the critical temperatures.

• Assignee: Troy Investments, Inc., Nashua, NH (United States)
• Patent Number(s): US 5064809; A
• Application Number: PPN: US 7-290178
• OSTI ID: 5746661
• Resource Relation: Patent File Date: 23 Dec 1988
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
HIGH-TC SUPERCONDUCTORS
CRITICAL TEMPERATURE
JOSEPHSON JUNCTIONS
FABRICATION
OXIDES
SUPERCONDUCTIVITY
ETCHING
LAYERS
SOLID-STATE PLASMA
SUBSTRATES
CHALCOGENIDES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
JUNCTIONS
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PLASMA
SUPERCONDUCTING JUNCTIONS
SUPERCONDUCTORS
SURFACE FINISHING
THERMODYNAMIC PROPERTIES
TRANSITION TEMPERATURE
665412* - Superconducting Devices- (1992-)
665411 - Basic Superconductivity Studies- (1992-)
360207 - Ceramics
Cermets
& Refractories- Superconducting Properties- (1992-)