RF discharge modeling considering time dependence and spatial nonlocality of the electron energy spectrum

Journal Article · Mon Apr 01 00:00:00 EST 1991 · IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States)

DOI:https://doi.org/10.1109/27.106810· OSTI ID:5709147

Feoktistov, V A; Popov, A M; Popovicheva, O B; Rakhimov, A T; Rakhimova, T V; Volkova, E A ^[1]

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1. Research Inst. of Nuclear Physics, Dept. of Microelectronics, Moscow State Univ., 119899 Moscow (SU)

RF discharge modeling in He is performed. New features of modeling are based on the solution of the nonstationary Boltzmann equation in the spatially nonuniform electric field, coupled with the equation for electric field and charged-particle densities. In this paper it is shown that the local equilibrium model for the electron energy spectrum in RF discharge is not valid for the pressure range {approx equal} 10 torr.

• OSTI ID: 5709147
• Journal Information: IEEE Transactions on Plasma Science (Institute of Electrical and Electronics Engineers); (United States), Vol. 19:2; ISSN 0093-3813
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
99 GENERAL AND MISCELLANEOUS//MATHEMATICS, COMPUTING, AND INFORMATION SCIENCE
HELIUM
HIGH-FREQUENCY DISCHARGES
MATHEMATICAL MODELS
BOLTZMANN EQUATION
CHARGED PARTICLES
COUPLING
ELECTRIC FIELDS
ELECTRON SPECTRA
ENERGY SPECTRA
EQUILIBRIUM
LOW PRESSURE
RF SYSTEMS
SPATIAL DISTRIBUTION
TIME DEPENDENCE
DIFFERENTIAL EQUATIONS
DISTRIBUTION
ELECTRIC DISCHARGES
ELEMENTS
EQUATIONS
FLUIDS
GASES
NONMETALS
PARTIAL DIFFERENTIAL EQUATIONS
RARE GASES
SPECTRA
426000* - Engineering- Components
Electron Devices & Circuits- (1990-)
990200 - Mathematics & Computers