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Title: Vertical-cavity surface emitting lasers: Moving from research to manufacturing

Abstract

After more than a decade of research, vertical-cavity surface emitting lasers (VCSELs) are making the transition into the manufacturing arena. The authors review unique VCSEL properties found in their structure, growth, fabrication, and performance, which have precipitated their commercial acceptance. The short optical cavity that is formed between two distributed Bragg reflector mirrors is a distinctive VCSEL attribute. The spectral alignment between the resonance of the optical cavity formed by these mirrors and the laser gain bandwidth is shown to influence the VCSEL performance. Thus, epitaxial VCSEL growth by metalorganic vapor-phase epitaxy aided by in situ reflectance monitoring is discussed with an emphasis on uniformity and reproducibility. They also describe the fabrication techniques and VCSEL structures used to obtain transverse electrical and optical confinement, including etched air-post, ion-implanted, and selectively oxidized VCSELs. For the latter, wet oxidation of AlGaAs to form buried-oxide apertures has enabled record laser performance, such as ultralow threshold current and high efficiency. Numerous applications for VCSELs have been identified that leverage their manufacturing and performance advantages.

Authors:
;  [1]
  1. Sandia National Labs., Albuquerque, NM (United States). Center for Compound Semiconductor Science and Technology
Publication Date:
Research Org.:
Sandia National Laboratories (SNL), Albuquerque, NM, and Livermore, CA (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States)
OSTI Identifier:
566556
DOE Contract Number:  
AC04-94AL85000
Resource Type:
Journal Article
Journal Name:
Proceedings of the IEEE
Additional Journal Information:
Journal Volume: 85; Journal Issue: 11; Other Information: PBD: Nov 1997
Country of Publication:
United States
Language:
English
Subject:
42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES; 32 ENERGY CONSERVATION, CONSUMPTION, AND UTILIZATION; SEMICONDUCTOR LASERS; MANUFACTURING; LASER CAVITIES; VAPOR PHASE EPITAXY; USES; FABRICATION

Citation Formats

Choquette, K D, and Hou, H Q. Vertical-cavity surface emitting lasers: Moving from research to manufacturing. United States: N. p., 1997. Web. doi:10.1109/5.649649.
Choquette, K D, & Hou, H Q. Vertical-cavity surface emitting lasers: Moving from research to manufacturing. United States. https://doi.org/10.1109/5.649649
Choquette, K D, and Hou, H Q. 1997. "Vertical-cavity surface emitting lasers: Moving from research to manufacturing". United States. https://doi.org/10.1109/5.649649.
@article{osti_566556,
title = {Vertical-cavity surface emitting lasers: Moving from research to manufacturing},
author = {Choquette, K D and Hou, H Q},
abstractNote = {After more than a decade of research, vertical-cavity surface emitting lasers (VCSELs) are making the transition into the manufacturing arena. The authors review unique VCSEL properties found in their structure, growth, fabrication, and performance, which have precipitated their commercial acceptance. The short optical cavity that is formed between two distributed Bragg reflector mirrors is a distinctive VCSEL attribute. The spectral alignment between the resonance of the optical cavity formed by these mirrors and the laser gain bandwidth is shown to influence the VCSEL performance. Thus, epitaxial VCSEL growth by metalorganic vapor-phase epitaxy aided by in situ reflectance monitoring is discussed with an emphasis on uniformity and reproducibility. They also describe the fabrication techniques and VCSEL structures used to obtain transverse electrical and optical confinement, including etched air-post, ion-implanted, and selectively oxidized VCSELs. For the latter, wet oxidation of AlGaAs to form buried-oxide apertures has enabled record laser performance, such as ultralow threshold current and high efficiency. Numerous applications for VCSELs have been identified that leverage their manufacturing and performance advantages.},
doi = {10.1109/5.649649},
url = {https://www.osti.gov/biblio/566556}, journal = {Proceedings of the IEEE},
number = 11,
volume = 85,
place = {United States},
year = {Sat Nov 01 00:00:00 EST 1997},
month = {Sat Nov 01 00:00:00 EST 1997}
}