Ultra high vacuum pumping system and high sensitivity helium leak detector
Patent
·
OSTI ID:563640
An improved helium leak detection method and apparatus are disclosed which increase the leak detection sensitivity to 10{sup {minus}13} atm cc/s. The leak detection sensitivity is improved over conventional leak detectors by completely eliminating the use of o-rings, equipping the system with oil-free pumping systems, and by introducing measured flows of nitrogen at the entrances of both the turbo pump and backing pump to keep the system free of helium background. The addition of dry nitrogen flows to the system reduces back streaming of atmospheric helium through the pumping system as a result of the limited compression ratios of the pumps for helium. 2 figs.
- Research Organization:
- Southeastern University Research Association
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC05-84ER40150
- Assignee:
- Southeastern Univ. Research Association, Newport News, VA (United States)
- Patent Number(s):
- US 5,703,281/A/
- Application Number:
- PAN: 8-646,773; TRN: 98:002115
- OSTI ID:
- 563640
- Resource Relation:
- Other Information: PBD: 30 Dec 1997
- Country of Publication:
- United States
- Language:
- English
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