Compact portable diffraction moire interferometer
Patent
·
OSTI ID:5542659
This patent describes an interferometer for performing the method of diffraction moire. It comprises: a source of a beam of coherent light, coupling means for coupling the beam of coherent light into a polarization maintaining single mode optical fiber; beam splitting means for splitting the beam of coherent light from the optical fiber into at least two beams of mutually coherent light; collimating means, directing the mutually coherent beams at one or more diffraction gratings replicated onto the surface of a work piece; observation means for viewing and measuring interference patterns created by the diffraction of the beams by the diffraction gratings.
- Assignee:
- EG G Idaho, Inc., Idaho Falls, ID
- Patent Number(s):
- US 4850693; A
- Application Number:
- PPN: US 7-197235A
- OSTI ID:
- 5542659
- Resource Relation:
- Patent File Date: 23 May 1988
- Country of Publication:
- United States
- Language:
- English
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