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Title: Compact portable diffraction moire interferometer

Patent ·
OSTI ID:5542659

This patent describes an interferometer for performing the method of diffraction moire. It comprises: a source of a beam of coherent light, coupling means for coupling the beam of coherent light into a polarization maintaining single mode optical fiber; beam splitting means for splitting the beam of coherent light from the optical fiber into at least two beams of mutually coherent light; collimating means, directing the mutually coherent beams at one or more diffraction gratings replicated onto the surface of a work piece; observation means for viewing and measuring interference patterns created by the diffraction of the beams by the diffraction gratings.

Assignee:
EG G Idaho, Inc., Idaho Falls, ID
Patent Number(s):
US 4850693; A
Application Number:
PPN: US 7-197235A
OSTI ID:
5542659
Resource Relation:
Patent File Date: 23 May 1988
Country of Publication:
United States
Language:
English