Range of 120 keV ions in solids. [Ion mass range: 24 to 209]

Journal Article · Thu Feb 01 00:00:00 EST 1979 · IEEE Trans. Nucl. Sci.; (United States)

DOI:https://doi.org/10.1109/TNS.1979.4330381· OSTI ID:5535246

Santry, D C; Werner, R D; Westcott, O M

A variety of heavy ions covering the mass range /sup 24/Mg to /sup 209/Bi were implanted at 120 keV using an electromagnetic isotope separator. Depth profiles of the implanted ions in thick targets of Be, C, Al, and Si were measured by He ion backscattering analysis. The measured range and range straggling of heavy ions were found to be in reasonable agreement with theory.

• Research Organization: Atomic Energy of Canada Ltd., Chalk River, Ontario
• OSTI ID: 5535246
• Journal Information: IEEE Trans. Nucl. Sci.; (United States), Vol. NS-26:1
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
73 NUCLEAR PHYSICS AND RADIATION PHYSICS
ALUMINIUM
ION IMPLANTATION
BERYLLIUM
CARBON
HEAVY IONS
COLLISIONS
RANGE
HELIUM IONS
BACKSCATTERING
SILICON
EXPERIMENTAL DATA
GRAPHS
KEV RANGE 100-1000
TABLES
ALKALINE EARTH METALS
CHARGED PARTICLES
DATA
DATA FORMS
ELEMENTS
ENERGY RANGE
INFORMATION
IONS
KEV RANGE
METALS
NONMETALS
NUMERICAL DATA
SCATTERING
SEMIMETALS
640301* - Atomic
Molecular & Chemical Physics- Beams & their Reactions
654001 - Radiation & Shielding Physics- Radiation Physics
Shielding Calculations & Experiments