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Title: Range of 120 keV ions in solids. [Ion mass range: 24 to 209]

Abstract

A variety of heavy ions covering the mass range /sup 24/Mg to /sup 209/Bi were implanted at 120 keV using an electromagnetic isotope separator. Depth profiles of the implanted ions in thick targets of Be, C, Al, and Si were measured by He ion backscattering analysis. The measured range and range straggling of heavy ions were found to be in reasonable agreement with theory.

Authors:
; ;
Publication Date:
Research Org.:
Atomic Energy of Canada Ltd., Chalk River, Ontario
OSTI Identifier:
5535246
Resource Type:
Journal Article
Journal Name:
IEEE Trans. Nucl. Sci.; (United States)
Additional Journal Information:
Journal Volume: NS-26:1
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 73 NUCLEAR PHYSICS AND RADIATION PHYSICS; ALUMINIUM; ION IMPLANTATION; BERYLLIUM; CARBON; HEAVY IONS; COLLISIONS; RANGE; HELIUM IONS; BACKSCATTERING; SILICON; EXPERIMENTAL DATA; GRAPHS; KEV RANGE 100-1000; TABLES; ALKALINE EARTH METALS; CHARGED PARTICLES; DATA; DATA FORMS; ELEMENTS; ENERGY RANGE; INFORMATION; IONS; KEV RANGE; METALS; NONMETALS; NUMERICAL DATA; SCATTERING; SEMIMETALS; 640301* - Atomic, Molecular & Chemical Physics- Beams & their Reactions; 654001 - Radiation & Shielding Physics- Radiation Physics, Shielding Calculations & Experiments

Citation Formats

Santry, D.C., Werner, R.D., and Westcott, O.M. Range of 120 keV ions in solids. [Ion mass range: 24 to 209]. United States: N. p., 1979. Web. doi:10.1109/TNS.1979.4330381.
Santry, D.C., Werner, R.D., & Westcott, O.M. Range of 120 keV ions in solids. [Ion mass range: 24 to 209]. United States. doi:10.1109/TNS.1979.4330381.
Santry, D.C., Werner, R.D., and Westcott, O.M. Thu . "Range of 120 keV ions in solids. [Ion mass range: 24 to 209]". United States. doi:10.1109/TNS.1979.4330381.
@article{osti_5535246,
title = {Range of 120 keV ions in solids. [Ion mass range: 24 to 209]},
author = {Santry, D.C. and Werner, R.D. and Westcott, O.M.},
abstractNote = {A variety of heavy ions covering the mass range /sup 24/Mg to /sup 209/Bi were implanted at 120 keV using an electromagnetic isotope separator. Depth profiles of the implanted ions in thick targets of Be, C, Al, and Si were measured by He ion backscattering analysis. The measured range and range straggling of heavy ions were found to be in reasonable agreement with theory.},
doi = {10.1109/TNS.1979.4330381},
journal = {IEEE Trans. Nucl. Sci.; (United States)},
number = ,
volume = NS-26:1,
place = {United States},
year = {1979},
month = {2}
}