Interdiffusion and structural relaxation in Mo/Si multilayer films
Interdiffusion and structural change on annealing of sputter-deposited Mo/Si and Mo(N)/Si(N) multilayer thin films have been investigated over the temperature range from 674 to 1027 K. X-ray diffractometry shows that in the as-deposited Mo/Si multilayers the Mo is bcc with the stacking of (110) plane parallel to the substrate, and the Si is amorphous, while in the as-deposited Mo(N)/Si(N) multilayers, both Mo and Si nitrides are amorphous. The interdiffusivities have been determined from the decay rate of satellite peak intensity around (000). The activation energies for the interdiffusion in Mo/Si and Mo(N)/Si(N) multilayers are 105 +- 5 and 351 +- 88 kJ mol/sup -1/, respectively. A drastic decrease in the satellite peak intensity on annealing is observed in the Mo/Si multilayer films, which is interpreted to be due to interdiffusion and structural relaxation. On the other hand, a remarkable increase in the satellite intensity is found for the nitride multilayer films, which is explained by crystallization into ..beta..-Mo/sub 2/N/..cap alpha..-Si/sub 3/N/sub 4/. The modulation wavelength decreases by 8%--12% after anneal. The decrease in the thickness of annealed Mo/Si multilayer films is also found by a depth profilometer.
- Research Organization:
- Institute for Materials Research, Tohoku University, Sendai 980, Japan
- OSTI ID:
- 5532432
- Journal Information:
- J. Appl. Phys.; (United States), Vol. 63:4
- Country of Publication:
- United States
- Language:
- English
Similar Records
Investigations of the crystallization mechanism of CrSb and CrSb{sub 2} multilayered films using in-situ X-ray diffraction and in-situ X-ray reflectometry
Microstructure of molybdenum disilicide-silicon carbide nanocomposite thin films
Related Subjects
MOLYBDENUM
ATOM TRANSPORT
CRYSTAL STRUCTURE
DIFFUSION
SILICON
AMORPHOUS STATE
ANNEALING
LAYERS
MOLYBDENUM NITRIDES
SILICON NITRIDES
SUPERLATTICES
X-RAY DIFFRACTION
COHERENT SCATTERING
DIFFRACTION
ELEMENTS
HEAT TREATMENTS
METALS
MOLYBDENUM COMPOUNDS
NEUTRAL-PARTICLE TRANSPORT
NITRIDES
NITROGEN COMPOUNDS
PNICTIDES
RADIATION TRANSPORT
REFRACTORY METAL COMPOUNDS
SCATTERING
SEMIMETALS
SILICON COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
360102* - Metals & Alloys- Structure & Phase Studies
360104 - Metals & Alloys- Physical Properties