Nanoscale field emission structures for ultra-low voltage operation at atmospheric pressure

Journal Article · Sat Nov 01 00:00:00 EST 1997 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.120276· OSTI ID:552941

Driskill-Smith, A A; Hasko, D G; Ahmed, H ^[1]

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1. Microelectronics Research Centre, Cavendish Laboratory, University of Cambridge, Cambridge CB30HE (United Kingdom)

Novel field emission devices with electron path lengths an order of magnitude less than the elastic mean free path of electrons in air have been fabricated and tested at atmospheric pressure. The nanoscale-tip field emission system consisted of multiple emitter tips of radii about 1 nm within an extractor aperture of diameter 50 nm. The extractor turn-on voltage was approximately 7.5 V; field-emitted currents of up to 10 nA were collected at extractor voltages of less than 10 V. Maximum current densities of over 10{sup 11}Am{sup {minus}2} have been observed, and the emission stability in air at atmospheric pressure is better than 3{percent}. {copyright} {ital 1997 American Institute of Physics.}

• OSTI ID: 552941
• Journal Information: Applied Physics Letters, Vol. 71, Issue 21; Other Information: PBD: Nov 1997
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING NOT INCLUDED IN OTHER CATEGORIES
ELECTRON SOURCES
FIELD EMISSION
MICROELECTRONICS
ATMOSPHERIC PRESSURE
CURRENT DENSITY
FABRICATION
APERTURES