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Title: Beryllium window and acoustic delay line design for x-ray lithography beam lines at the University of Wisconsin Center for X-ray Lithography

Abstract

X-ray lithography systems require sample chambers that can perform exposures in helium gas at atmospheric pressure. The interface between the experimental chamber and the beamline is critical for x-ray lithography and the storage ring. It must allow a high x-ray flux throughput while providing a vacuum barrier so that helium gas does not leak into the beam line and the storage ring. The beam line must also be designed to have protection in the case that a window does fail in order to minimize adverse effects to the ring and other systems. The details of the design for the vacuum system used on beam lines for the Center for X-ray Lithography at the University of Wisconsin Synchrotron Radiation Center 1-GeV electron storage ring are reported. Curved beryllium windows with a 1{times}5-cm{sup 2} aperture and 13 {mu}m thick that have a leak rate less than 10{sup {minus}10} Torr l/s have been successfully used at the experimental chamber beam-line interface. This thin flat beryllium foil is mounted in a curved housing with a wire seal to minimize helium leakage. The window assembly is designed and has been tested to withstand substantial overpressure before failure. If the beryllium window does fail, the beamlinemore » has an acoustic delay line that is designed to delay the incoming shock wave of helium gas so that a fast valve at the end of the beam line will close and minimize leakage of helium into the storage ring. The acoustic delay line is designed with baffles to slow the shock front and a secondary thin window to protect against molecular diffusion into the storage ring. The acoustic delay line has been tested to determine the effect of baffle design on delay of the shock wave. A theoretical model that provides a good description of the acoustic delay has also been developed.« less

Authors:
 [1];  [2]; ;  [1];  [2]
  1. Center for X-ray Lithography, University of Wisconsin, 3731 Schneider Drive, Stoughton, Wisconsin 53589 (United States)
  2. Nuclear Engineering and Engineering Physics, University of Wisconsin, 153 Engineering Research Building, Madison, Wisconsin 53705 (United States)
Publication Date:
OSTI Identifier:
5520969
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments; (United States)
Additional Journal Information:
Journal Volume: 63:1; Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; SYNCHROTRON RADIATION SOURCES; X-RAY EQUIPMENT; DESIGN; BEAM OPTICS; ELECTRON BEAMS; STORAGE RINGS; VACUUM SYSTEMS; X-RAY SOURCES; BEAMS; EQUIPMENT; LEPTON BEAMS; PARTICLE BEAMS; RADIATION SOURCES; 430303* - Particle Accelerators- Experimental Facilities & Equipment

Citation Formats

Brodsky, E L, Hamilton, W, Wells, G, Cerrina, F, and Corradini, M. Beryllium window and acoustic delay line design for x-ray lithography beam lines at the University of Wisconsin Center for X-ray Lithography. United States: N. p., 1992. Web. doi:10.1063/1.1142651.
Brodsky, E L, Hamilton, W, Wells, G, Cerrina, F, & Corradini, M. Beryllium window and acoustic delay line design for x-ray lithography beam lines at the University of Wisconsin Center for X-ray Lithography. United States. https://doi.org/10.1063/1.1142651
Brodsky, E L, Hamilton, W, Wells, G, Cerrina, F, and Corradini, M. 1992. "Beryllium window and acoustic delay line design for x-ray lithography beam lines at the University of Wisconsin Center for X-ray Lithography". United States. https://doi.org/10.1063/1.1142651.
@article{osti_5520969,
title = {Beryllium window and acoustic delay line design for x-ray lithography beam lines at the University of Wisconsin Center for X-ray Lithography},
author = {Brodsky, E L and Hamilton, W and Wells, G and Cerrina, F and Corradini, M},
abstractNote = {X-ray lithography systems require sample chambers that can perform exposures in helium gas at atmospheric pressure. The interface between the experimental chamber and the beamline is critical for x-ray lithography and the storage ring. It must allow a high x-ray flux throughput while providing a vacuum barrier so that helium gas does not leak into the beam line and the storage ring. The beam line must also be designed to have protection in the case that a window does fail in order to minimize adverse effects to the ring and other systems. The details of the design for the vacuum system used on beam lines for the Center for X-ray Lithography at the University of Wisconsin Synchrotron Radiation Center 1-GeV electron storage ring are reported. Curved beryllium windows with a 1{times}5-cm{sup 2} aperture and 13 {mu}m thick that have a leak rate less than 10{sup {minus}10} Torr l/s have been successfully used at the experimental chamber beam-line interface. This thin flat beryllium foil is mounted in a curved housing with a wire seal to minimize helium leakage. The window assembly is designed and has been tested to withstand substantial overpressure before failure. If the beryllium window does fail, the beamline has an acoustic delay line that is designed to delay the incoming shock wave of helium gas so that a fast valve at the end of the beam line will close and minimize leakage of helium into the storage ring. The acoustic delay line is designed with baffles to slow the shock front and a secondary thin window to protect against molecular diffusion into the storage ring. The acoustic delay line has been tested to determine the effect of baffle design on delay of the shock wave. A theoretical model that provides a good description of the acoustic delay has also been developed.},
doi = {10.1063/1.1142651},
url = {https://www.osti.gov/biblio/5520969}, journal = {Review of Scientific Instruments; (United States)},
issn = {0034-6748},
number = ,
volume = 63:1,
place = {United States},
year = {Wed Jan 01 00:00:00 EST 1992},
month = {Wed Jan 01 00:00:00 EST 1992}
}