Oriented silicon wafer latch accelerometer (110)
Patent Application
·
OSTI ID:5517934
A method for etching a (110) silicon wafer to produce latching cantilever beams, which bend parallel to the surface of the wafer. The resulting apparatus is also part of the invention. 6 figs.
- Research Organization:
- Lawrence Livermore National Lab., CA (United States)
- Sponsoring Organization:
- USDOE; USDOE, Washington, DC (United States)
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Dept. of Energy
- Patent Number(s):
- PATENTS-US-A7250591
- Application Number:
- ON: DE91017326; PPN: US 7-250591
- OSTI ID:
- 5517934
- Country of Publication:
- United States
- Language:
- English
Similar Records
(110) Oriented silicon wafer latch accelerometer and process for forming the same
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Patent
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Mon Jan 01 00:00:00 EST 1990
·
OSTI ID:5517934
(110) Oriented silicon wafer latch accelerometer process for forming the same
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Tue Jan 02 00:00:00 EST 1990
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Technical Report
·
Fri Oct 09 00:00:00 EDT 1987
·
OSTI ID:5517934
Related Subjects
36 MATERIALS SCIENCE
42 ENGINEERING
SILICON
ETCHING
SWITCHES
FABRICATION
ALIGNMENT
DESIGN
INTEGRATED CIRCUITS
INVENTIONS
ORIENTATION
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
MICROELECTRONIC CIRCUITS
SEMIMETALS
SURFACE FINISHING
360601* - Other Materials- Preparation & Manufacture
426000 - Engineering- Components
Electron Devices & Circuits- (1990-)
42 ENGINEERING
SILICON
ETCHING
SWITCHES
FABRICATION
ALIGNMENT
DESIGN
INTEGRATED CIRCUITS
INVENTIONS
ORIENTATION
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELEMENTS
EQUIPMENT
MICROELECTRONIC CIRCUITS
SEMIMETALS
SURFACE FINISHING
360601* - Other Materials- Preparation & Manufacture
426000 - Engineering- Components
Electron Devices & Circuits- (1990-)