Sextupole system for the correction of spherical aberration
Patent
·
OSTI ID:5506319
A means is provided for compensating for spherical aberration in charged particle beam devices. The means includes a sextupole positioned between two focusing lenses.
- Assignee:
- Dept. of Energy
- Patent Number(s):
- US 4303864
- Application Number:
- TRN: 82-007184
- OSTI ID:
- 5506319
- Resource Relation:
- Patent File Date: Filed date 25 Oct 1979; Other Information: PAT-APPL-088224
- Country of Publication:
- United States
- Language:
- English
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