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Title: Multilayer diffraction grating

Abstract

This invention is for a reflection diffraction grating that functions at x-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D is in the approximate range from 3000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages. 2 figs.

Inventors:
Publication Date:
Research Org.:
Lawrence Livermore National Lab., CA (United States)
Sponsoring Org.:
USDOE; USDOE, Washington, DC (United States)
OSTI Identifier:
5482154
Patent Number(s):
PATENTS-US-A7259564
Application Number:
ON: DE91016976; PPN: US 7-259564
Assignee:
Dept. of Energy LLNL; EDB-91-124339
DOE Contract Number:
W-7405-ENG-48
Resource Type:
Patent Application
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 47 OTHER INSTRUMENTATION; DIFFRACTION GRATINGS; DESIGN; CARBON; DEPOSITION; FAR ULTRAVIOLET RADIATION; INVENTIONS; LAYERS; MOLYBDENUM; MOLYBDENUM SILICIDES; OPTICAL REFLECTION; RESOLUTION; RHODIUM; SILICON; STAINLESS STEELS; TUNGSTEN; TUNGSTEN CARBIDES; X RADIATION; ALLOYS; CARBIDES; CARBON COMPOUNDS; ELECTROMAGNETIC RADIATION; ELEMENTS; GRATINGS; HIGH ALLOY STEELS; IONIZING RADIATIONS; IRON ALLOYS; IRON BASE ALLOYS; METALS; MOLYBDENUM COMPOUNDS; NONMETALS; PLATINUM METALS; RADIATIONS; REFLECTION; REFRACTORY METAL COMPOUNDS; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; STEELS; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS; TUNGSTEN COMPOUNDS; ULTRAVIOLET RADIATION; 360101* - Metals & Alloys- Preparation & Fabrication; 440600 - Optical Instrumentation- (1990-); 360601 - Other Materials- Preparation & Manufacture; 360104 - Metals & Alloys- Physical Properties; 360603 - Materials- Properties

Citation Formats

Barbee, T.W., Jr. Multilayer diffraction grating. United States: N. p., 1988. Web.
Barbee, T.W., Jr. Multilayer diffraction grating. United States.
Barbee, T.W., Jr. Tue . "Multilayer diffraction grating". United States. doi:.
@article{osti_5482154,
title = {Multilayer diffraction grating},
author = {Barbee, T.W., Jr.},
abstractNote = {This invention is for a reflection diffraction grating that functions at x-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D is in the approximate range from 3000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages. 2 figs.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Tue Oct 18 00:00:00 EDT 1988},
month = {Tue Oct 18 00:00:00 EDT 1988}
}
  • This invention is for a reflection diffraction grating that functions at X-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D ismore » in the approximate range from 3,000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages.« less
  • This invention is for a reflection diffraction grating that functions at X-ray to VUV wavelengths and at normal angles of incidence. The novel grating is comprised of a laminar grating of period D with flat-topped grating bars. A multiplicity of layered synthetic microstructures, of period d and comprised of alternating flat layers of two different materials, are disposed on the tops of the grating bars of the laminar grating. In another embodiment of the grating, a second multiplicity of layered synthetic microstructures are also disposed on the flat faces, of the base of the grating, between the bars. D ismore » in the approximate range from 3,000 to 50,000 Angstroms, but d is in the approximate range from 10 to 400 Angstroms. The laminar grating and the layered microstructures cooperatively interact to provide many novel and beneficial instrumentational advantages. 2 figs.« less
  • An electrically-programmable diffraction grating is disclosed. The programmable grating includes a substrate having a plurality of electrodes formed thereon and a moveable grating element above each of the electrodes. The grating elements are electrostatically programmable to form a diffraction grating for diffracting an incident beam of light as it is reflected from the upper surfaces of the grating elements. The programmable diffraction grating, formed by a micromachining process, has applications for optical information processing (e.g. optical correlators and computers), for multiplexing and demultiplexing a plurality of light beams of different wavelengths (e.g. for optical fiber communications), and for forming spectrometersmore » (e.g. correlation and scanning spectrometers). 14 figs.« less
  • A near-perfect grating rhomb enables an output beam to be diffracted to an angle offset from the input beam. The correcting grating is tipped relative to the dispersing grating to provide the offset angle. The correcting grating is further provided with a groove spacing which differs from the dispersing grating groove space by an amount effective to substantially remove angular dispersion in the output beam. A near-perfect grating rhomb has the capability for selective placement in a FEL to suppress sideband instabilities arising from the FEL.
  • A compact and portable diffraction grating maker comprised of a laser beam, optical and fiber optics devices coupling the beam to one or more evanescent beam splitters, and collimating lenses or mirrors directing the split beam at an appropriate photosensitive material. The collimating optics, the output ends of the fiber optic coupler and the photosensitive plate holder are all mounted on an articulated framework so that the angle of intersection of the beams can be altered at will without disturbing the spatial filter, collimation or beam quality, and assuring that the beams will always intersect at the position of themore » plate.« less