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Title: Beam solid interactions: Fundamentals and applications

Conference ·
OSTI ID:5472015
 [1];  [2];  [3];  [4]
  1. ed.; Los Alamos National Lab., NM (United States)
  2. ed.; AT and T Labs., Murray Hill, NJ (United States)
  3. ed.; Arizona State Univ., Tempe, AZ (United States)
  4. ed.; Univ. of Illinois, Urbana, IL (United States)

The symposium organizers attempted to include a fairly comprehensive overview of the subject of beam solid interactions. The majority of the presentations dealt with ion beams, but there were a significant number of papers on the subjects of photon and electron interactions as well. The scope of the symposium was intended to cover the range from the basic physics of beam solid interactions to a wide variety of current and emerging applications of beam techniques. The symposium included materials of virtually all classes from electronic and optical materials to metals and ceramics. The papers in this volume have been divided into ten categories covering the scope of the symposium. The first section covers the basic physics of beam solid interactions through computer simulations and calculations. This is followed by a section on high energy interactions mainly through electronic excitation. The third and fourth sections are the largest and cover radiation damage and implantation. The papers in this subject have been divided according to material systems. One section deals with electronic and optical materials, while the second covers metals, ceramics, and other materials. A section on beam induced amorphization and recrystallization then follows. Papers on finely focused beams and the issues associated with fine scale patterning have been grouped together in the next section. The remaining sections cover ion beam deposition, laser processing, sputtering and etching, and mesotaxy. Separate abstracts were prepared for 138 items in this conference.

OSTI ID:
5472015
Report Number(s):
CONF-921101-; ISBN: 1-55899-174-3
Resource Relation:
Conference: 16. Materials Research Society (MRS) fall meeting, Boston, MA (United States), 30 Nov - 5 Dec 1992
Country of Publication:
United States
Language:
English