Method of fabricating Schottky barrier solar cell

Patent · Tue Mar 23 00:00:00 EST 1982

OSTI ID:5462501

Stirn, R J; Yeh, Y M

A Schottky barrier solar cell consists of a thin substrate of low cost material with at least the top surface of the substrate being electrically conductive. A thin layer of heavily doped ntype polycrystalline germanium, with crystalline sizes in the submicron range, is deposited on the substrate. But first a passivation layer may be deposited on the substrate to prevent migration of impurities into the polycrystalline germanium on a substrate of low-cost conductive material. Then the polycrystalline germanium is recrystallized to increase the crystal sizes in the germanium layer to not less than 5 microns, and preferably considerably more. It serves as a base layer on which a thin layer of gallium arsenide is vapor-epitaxially grown to a selected thickness. Then, a thermally-grown oxide layer of a thickness of several tens of angstroms is formed on the gallium arsenide layer. A metal layer, of not more than about 100 angstroms thick, is deposited on the oxide layer, and a grid electrode is deposited to be in electrical contact with the top surface of the metal layer. An antireflection coating may be deposited on the exposed top surface of the metal layer. In another embodiment, the recrystallized germanium layer serves as the substrate for a Schottky barrier solar cell with more than one active semiconductor layer. The techniques of forming the oxide layer are also applicable in forming an oxide layer between a metal layer and a semiconductor material which together form a schottky barrier junction in any solar cell.

• Assignee: U S Of America NASA Administrator Of
• Patent Number(s): US 4321099
• OSTI ID: 5462501
• Resource Relation: Patent File Date: Filed date 16 Jan 1981; Other Information: PAT-APPL-225501
• Country of Publication: United States
• Language: English

Related Subjects

14 SOLAR ENERGY
GALLIUM ARSENIDE SOLAR CELLS
FABRICATION
ANTIREFLECTION COATINGS
DOPED MATERIALS
ELECTRIC CONTACTS
EPITAXY
GERMANIUM
LAYERS
N-TYPE CONDUCTORS
OXIDES
PARTICLE SIZE
PASSIVATION
PHOTOELECTRIC CELLS
POLYCRYSTALS
PROTECTIVE COATINGS
RECRYSTALLIZATION
SCHOTTKY BARRIER DIODES
SEMICONDUCTOR MATERIALS
CHALCOGENIDES
COATINGS
CRYSTALS
DIRECT ENERGY CONVERTERS
ELECTRICAL EQUIPMENT
ELEMENTS
EQUIPMENT
MATERIALS
METALS
OXYGEN COMPOUNDS
PHOTOVOLTAIC CELLS
SEMICONDUCTOR DEVICES
SEMICONDUCTOR DIODES
SIZE
SOLAR CELLS
SOLAR EQUIPMENT
140501* - Solar Energy Conversion- Photovoltaic Conversion