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Title: Sol-gel synthesis of LaAlO{sub 3}; epitaxial growth of LaAlO{sub 3} thin films on SrTiO{sub 3} (100)

Abstract

A LaAlO{sub 3} precursor solution was prepared via an all alkoxide sol-gel route. The solution of lanthanum methoxyethoxide and aluminum methoxyethoxide in 2-methoxyethanol was prepared via ligand exchange starting from lanthanum isopropoxide and aluminum sec-butoxide and was used to make both LaAlO{sub 3} powders and films. Complete hydrolysis of the solution formed a gel that yielded well-crystallized LaAlO{sub 3} powders when fired in air at 800{degree}C. A partially hydrolyzed solution was spun-cast on SrTiO{sub 3} (100) single crystal substrates. Epitaxial films of LaAlO{sub 3} were subsequently formed during pyrolysis in O{sub 2} at 800{degree}C in a rapid thermal annealing furnace for a total of 8 min. The films were strongly c-axis oriented, verified by x-ray rocking curve results from the (003) plane with full-width at half-maximum (FWHM)=0.87{degree}, and had good in-plane texture shown by a {phi} scan of the (202) plane with FWHM=1.07{degree}. {copyright} {ital 1997 Materials Research Society.}

Authors:
; ;  [1]; ;  [2]
  1. Chemical Sciences Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6100 (United States)
  2. Metals and Ceramics Division, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6118 (United States)
Publication Date:
Research Org.:
Oak Ridge National Laboratory
OSTI Identifier:
544548
DOE Contract Number:  
AC05-96OR22464
Resource Type:
Journal Article
Journal Name:
Journal of Materials Research
Additional Journal Information:
Journal Volume: 12; Journal Issue: 4; Other Information: PBD: Apr 1997
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; LANTHANUM OXIDES; SOL-GEL PROCESS; ALUMINIUM OXIDES; THIN FILMS; CERAMICS; STRONTIUM OXIDES; TITANIUM OXIDES; SUBSTRATES; TEXTURE; EPITAXY

Citation Formats

Shoup, S S, Paranthaman, M, Beach, D B, Specht, E D, and Williams, R K. Sol-gel synthesis of LaAlO{sub 3}; epitaxial growth of LaAlO{sub 3} thin films on SrTiO{sub 3} (100). United States: N. p., 1997. Web. doi:10.1557/JMR.1997.0142.
Shoup, S S, Paranthaman, M, Beach, D B, Specht, E D, & Williams, R K. Sol-gel synthesis of LaAlO{sub 3}; epitaxial growth of LaAlO{sub 3} thin films on SrTiO{sub 3} (100). United States. doi:10.1557/JMR.1997.0142.
Shoup, S S, Paranthaman, M, Beach, D B, Specht, E D, and Williams, R K. Tue . "Sol-gel synthesis of LaAlO{sub 3}; epitaxial growth of LaAlO{sub 3} thin films on SrTiO{sub 3} (100)". United States. doi:10.1557/JMR.1997.0142.
@article{osti_544548,
title = {Sol-gel synthesis of LaAlO{sub 3}; epitaxial growth of LaAlO{sub 3} thin films on SrTiO{sub 3} (100)},
author = {Shoup, S S and Paranthaman, M and Beach, D B and Specht, E D and Williams, R K},
abstractNote = {A LaAlO{sub 3} precursor solution was prepared via an all alkoxide sol-gel route. The solution of lanthanum methoxyethoxide and aluminum methoxyethoxide in 2-methoxyethanol was prepared via ligand exchange starting from lanthanum isopropoxide and aluminum sec-butoxide and was used to make both LaAlO{sub 3} powders and films. Complete hydrolysis of the solution formed a gel that yielded well-crystallized LaAlO{sub 3} powders when fired in air at 800{degree}C. A partially hydrolyzed solution was spun-cast on SrTiO{sub 3} (100) single crystal substrates. Epitaxial films of LaAlO{sub 3} were subsequently formed during pyrolysis in O{sub 2} at 800{degree}C in a rapid thermal annealing furnace for a total of 8 min. The films were strongly c-axis oriented, verified by x-ray rocking curve results from the (003) plane with full-width at half-maximum (FWHM)=0.87{degree}, and had good in-plane texture shown by a {phi} scan of the (202) plane with FWHM=1.07{degree}. {copyright} {ital 1997 Materials Research Society.}},
doi = {10.1557/JMR.1997.0142},
journal = {Journal of Materials Research},
number = 4,
volume = 12,
place = {United States},
year = {1997},
month = {4}
}