Ion beam sputter deposition onto levitated and stalk mounted laser fusion targets

Journal Article · Thu Apr 01 00:00:00 EST 1982 · J. Vac. Sci. Technol.; (United States)

DOI:https://doi.org/10.1116/1.571598· OSTI ID:5418617

Glocker, D A; Drumheller, J P; Miller, J R

Ion beam sputter deposition has been used to coat both levitated and stalk mounted hollow glass microballoon (GMB) laser fusion targets. GMBs levitated with a focused molecular beam were coated with Cu at pressures which ranged from 0.020 Pa (0.15 mTorr) to 0.13 Pa (1.0 mTorr). Stalk mounted GMBs were coated with Cu, Fe, Ta, or Mo at pressures from 0.0050 Pa (0.038 mTorr) to 0.10 Pa (0.75 mTorr). Beam energies of 300--1000 eV and beam current densities of 4--8 mA/cm/sup 2/ were used. Scanning electron micrographs of fractured cross sections of the coatings were examined for film structure and surface smoothness. As the deposition pressure was reduced, both Cu and Fe exhibited a transition from zone 1 to zone T growth, in agreement with Thornton's Structure Zone Model. The Ta and Mo coatings were dense and had surface roughness less than 100 nm at all beam powers and pressures studied.

• Research Organization: Laboratory for Laser Energetics, University of Rochester, 250 East River Road, Rochester, New York 14623
• OSTI ID: 5418617
• Journal Information: J. Vac. Sci. Technol.; (United States), Vol. 20:4
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
ARGON IONS
COLLISIONS
COPPER
CHEMICAL VAPOR DEPOSITION
SPUTTERING
IRON
LASER TARGETS
FABRICATION
VAPOR DEPOSITED COATINGS
MOLYBDENUM
ROUGHNESS
TANTALUM
EV RANGE 100-1000
FILMS
HIGH VACUUM
ION BEAMS
MICROSPHERES
MOLECULAR BEAMS
THICKNESS
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CHARGED PARTICLES
CHEMICAL COATING
COATINGS
DEPOSITION
DIMENSIONS
ELEMENTS
ENERGY RANGE
EV RANGE
IONS
METALS
SURFACE COATING
SURFACE PROPERTIES
TARGETS
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