Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists
Abstract
Photoresist techniques and compositions are provided employing curcumin as an absorptive dye for the purpose of reducing linewidth non-uniformity caused by scattered and reflective light from the substrate-resist interface. The photoresist compositions containing curcumin as the absorptive dye are used in the production of microelectronic circuitry by both single layer and multilayer photoresist techniques. 2 figs.
- Inventors:
- Publication Date:
- Research Org.:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Org.:
- USDOE; USDOE, Washington, DC (United States)
- OSTI Identifier:
- 5409799
- Patent Number(s):
- PATENTS-US-A7258543
- Application Number:
- ON: DE91016973; PPN: US 7-258543
- Assignee:
- Dept. of Energy
- DOE Contract Number:
- AC04-76DP00789
- Resource Type:
- Patent Application
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 36 MATERIALS SCIENCE; 42 ENGINEERING; DYES; ABSORPTIVITY; CURCUMIN; ETCHING; INVENTIONS; MICROELECTRONIC CIRCUITS; PHOTORESISTORS; RESINS; AROMATICS; ELECTRICAL EQUIPMENT; ELECTRONIC CIRCUITS; EQUIPMENT; ETHERS; HYDROXY COMPOUNDS; KETONES; OPTICAL PROPERTIES; ORGANIC COMPOUNDS; ORGANIC OXYGEN COMPOUNDS; ORGANIC POLYMERS; PETROCHEMICALS; PETROLEUM PRODUCTS; PHENOLS; PHYSICAL PROPERTIES; POLYMERS; POLYPHENOLS; RESISTORS; SURFACE FINISHING; 360603* - Materials- Properties; 426000 - Engineering- Components, Electron Devices & Circuits- (1990-)
Citation Formats
Renschler, C L. Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists. United States: N. p., 1988.
Web.
Renschler, C L. Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists. United States.
Renschler, C L. 1988.
"Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists". United States.
@article{osti_5409799,
title = {Phenolic dyes as nonbleachable absorbers compatible with novolac resins for linewidth control in photoresists},
author = {Renschler, C L},
abstractNote = {Photoresist techniques and compositions are provided employing curcumin as an absorptive dye for the purpose of reducing linewidth non-uniformity caused by scattered and reflective light from the substrate-resist interface. The photoresist compositions containing curcumin as the absorptive dye are used in the production of microelectronic circuitry by both single layer and multilayer photoresist techniques. 2 figs.},
doi = {},
url = {https://www.osti.gov/biblio/5409799},
journal = {},
number = ,
volume = ,
place = {United States},
year = {Mon Oct 17 00:00:00 EDT 1988},
month = {Mon Oct 17 00:00:00 EDT 1988}
}
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