A coordinated US program in soft x-ray projection lithography

Technical Report · Wed Apr 01 00:00:00 EST 1992

OSTI ID:5394196

Ceglio, N M

This report discusses soft x-ray projection lithography (SXPL), technical development requirements, technological capabilities in the US SXPL community; and a coordinated technical program in SXPL. (LSP).

• Research Organization: Lawrence Livermore National Lab., CA (United States)
• Sponsoring Organization: USDOE; USDOE, Washington, DC (United States)
• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 5394196
• Report Number(s): UCRL-ID-110194; ON: DE92012397
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
INTEGRATED CIRCUITS
X-RAY DIFFRACTION
X-RAY EQUIPMENT
DESIGN
BEAM OPTICS
LASER-PRODUCED PLASMA
MIRRORS
X-RAY DETECTION
X-RAY SOURCES
COHERENT SCATTERING
DETECTION
DIFFRACTION
ELECTRONIC CIRCUITS
EQUIPMENT
MICROELECTRONIC CIRCUITS
PLASMA
RADIATION DETECTION
RADIATION SOURCES
SCATTERING
426000* - Engineering- Components
Electron Devices & Circuits- (1990-)
440101 - Radiation Instrumentation- General Detectors or Monitors & Radiometric Instruments