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Title: Collisionless electron heating in inductively coupled discharges

Journal Article · · Physics of Plasmas
DOI:https://doi.org/10.1063/1.872455· OSTI ID:538460
;  [1]
  1. Institute for Fusion Studies, The University of Texas at Austin, Austin, Texas 78712 (United States)

A kinetic theory of collisionless electron heating is developed for inductively coupled discharges with a finite length L. The novel effect associated with the finite-length system is the resonance between the bounce motion of the electrons and the wave frequency, leading to enhanced heating. The theory is in agreement with results of electromagnetic particle simulations. {copyright} {ital 1997 American Institute of Physics.}

Research Organization:
Univesity of Texas
DOE Contract Number:
FG03-96ER54346
OSTI ID:
538460
Journal Information:
Physics of Plasmas, Vol. 4, Issue 9; Other Information: PBD: Sep 1997
Country of Publication:
United States
Language:
English

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