Multilayered thin film superconductive device, and method of making same

Patent · Tue Oct 07 00:00:00 EDT 1975

OSTI ID:5376128

Notarys, H A; Mercereau, J E

Techniques are disclosed for fabrication of superconducting thin film structures which show Josephson-like effects and which allow fabrication of standard components, such as resistors and capacitors in circuits. Superimposed thin films of selected metals are deposited, at least one of which is superconducting, and all of which are stable (i.e., will not diffuse and are sufficiently inert to be chemically stable under normal use). The thin films are all effectively removed around the desired structure by anodization through a photoresist mask or by ion beam etching. A structure which shows a Josephson-like effect is produced by so manipulating the thin films that a thin line region across a narrowed section of the layered thin films is produced with a lower transition temperature than in the surrounding layered films. This is done by altering the ratio of the thickness of the superconductive thin film to the thickness of the nonsuperconductive thin film in the thin line region and controlling the dimension, l, of the thin line region in the direction of current flow.

• Assignee: California Inst. of Tech.
• Patent Number(s): US 3911333
• OSTI ID: 5376128
• Resource Relation: Patent File Date: Filed date 5 Nov 1973
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
SUPERCONDUCTING FILMS
FABRICATION
ANODIZATION
ELECTRICAL PROPERTIES
ETCHING
STABILIZED SUPERCONDUCTORS
SUBSTRATES
SUPERCONDUCTING JUNCTIONS
CHEMICAL COATING
CORROSION PROTECTION
DEPOSITION
ELECTROCHEMICAL COATING
ELECTROLYSIS
FILMS
LYSIS
PHYSICAL PROPERTIES
SUPERCONDUCTORS
SURFACE COATING
SURFACE FINISHING
420201* - Engineering- Cryogenic Equipment & Devices