High-quality Y sub 1 Ba sub 2 Cu sub 3 O sub 7 minus sub x thin films on polycrystalline MgO by temperature-controlled chemical vapor deposition

Journal Article · Mon Sep 02 00:00:00 EDT 1991 · Applied Physics Letters; (United States)

DOI:https://doi.org/10.1063/1.105517· OSTI ID:5362926

Feng, A; Chen, L; Piazza, T W; Li, H; Kaloyeros, A E ^[1]; Hazelton, D W ^[2]; Luo, L; Dye, R C ^[3]

---

1. Department of Physics, The University at Albany-SUNY, Albany, New York (USA)
2. Intermagnetics General Corporation, Guilderland, New York (USA)
3. Center for Materials Science, Los Alamos National Laboratory, Los Alamos, New Mexico (USA)

Y{sub 1}Ba{sub 2}Cu{sub 3}O{sub 7{minus}{ital x}} superconducting thin films were grown {ital in} {ital situ} on polycrystalline MgO substrates by a chemical vapor deposition process that closely couples the sublimation temperatures of the elemental sources to that of the substrate during deposition. It was found that the best quality films were achieved with a controlled ramping of the substrate temperature from 850 {degree}C, at the onset of deposition, down to 750 {degree}C at the end of deposition. The films were analyzed by Rutherford backscattering (RBS), scanning electron microscopy (SEM), x-ray diffractometry (XRD), and four-point resistivity probe. The results of these studies showed that the films were highly {ital c}-axis oriented, had near-stoichiometric composition, and exhibited {ital T}{sub c,onset}=90 K, {ital T}{sub co}=85 K, and had a {ital J}{sub c}=2{times}10{sup 5} A/cm{sup 2} at 77 K in zero magnetic field. A model is proposed for the effect of such temperature control on the CVD growth mechanism of high-quality YBCO films.

• OSTI ID: 5362926
• Journal Information: Applied Physics Letters; (United States), Vol. 59:10; ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
BARIUM OXIDES
CHEMICAL VAPOR DEPOSITION
SUPERCONDUCTIVITY
TEMPERATURE CONTROL
COPPER OXIDES
HIGH-TC SUPERCONDUCTORS
YTTRIUM OXIDES
IN-SITU PROCESSING
LASL
MAGNESIUM OXIDES
MATHEMATICAL MODELS
POLYCRYSTALS
RUTHERFORD SCATTERING
SCANNING ELECTRON MICROSCOPY
STOICHIOMETRY
SUPERCONDUCTING FILMS
TRANSITION TEMPERATURE
VERY HIGH TEMPERATURE
X-RAY DIFFRACTION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
CHEMICAL COATING
COHERENT SCATTERING
CONTROL
COPPER COMPOUNDS
CRYSTALS
DEPOSITION
DIFFRACTION
ELASTIC SCATTERING
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
ELECTRON MICROSCOPY
FILMS
MAGNESIUM COMPOUNDS
MICROSCOPY
NATIONAL ORGANIZATIONS
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
PROCESSING
SCATTERING
SUPERCONDUCTORS
SURFACE COATING
THERMODYNAMIC PROPERTIES
TRANSITION ELEMENT COMPOUNDS
US AEC
US DOE
US ERDA
US ORGANIZATIONS
YTTRIUM COMPOUNDS
360201* - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies
360204 - Ceramics
Cermets
& Refractories- Physical Properties