Sputter coating of microspherical substrates by levitation

Patent ·

OSTI ID:5357269

Lowe, A T; Hosford, C D

Microspheres are substantially uniformly coated with metals or nonmetals by simltaneously levitating them and sputter coating them at total chamber pressures less than 1 torr. A collimated hole structure comprising a parallel array of upwardly projecting individual gas outlets is machined out to form a dimple. Glass microballoons,, which are particularly useful in laser fusion applications, can be substantially uniformly coated using the coating method and apparatus.

• DOE Contract Number: W-7405-ENG-36
• Assignee: TIC; ERA-05-030339; EDB-80-088429
• OSTI ID: 5357269
• Country of Publication: United States
• Language: English

Related Subjects

70 PLASMA PHYSICS AND FUSION TECHNOLOGY
MICROSPHERES
SURFACE COATING
LASER TARGETS
LEVITATION
SPUTTERING
DEPOSITION
TARGETS
060201* - Fusion Fuels- Fabrication & Testing- (1980-1987)