On the use of actinometric emission spectroscopy in SF/sub 6/-O/sub 2/ radiofrequency discharges: theoretical and experimental analysis
Journal Article
·
· Plasma Chem. Plasma Process.; (United States)
A comparison of the results obtained by solving the Boltzmann equation with the experimental results from optical emissions obtained in SF/sub 6/-O/sub 2/ radiofrequency discharges, when N/sub 2/, Ar, and He are also admitted as actinometers, has allowed us to explore the potentialities and limits of actinometry. The use of different actinometers also allowed us to monitor the evolution of the electron distribution functions as a function of the plasma parameters.
- Research Organization:
- Univ. di Bari, Bari
- OSTI ID:
- 5344246
- Journal Information:
- Plasma Chem. Plasma Process.; (United States), Vol. 5:3
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
37 INORGANIC
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
OXYGEN
EMISSION SPECTROSCOPY
HIGH-FREQUENCY DISCHARGES
PLASMA DIAGNOSTICS
SULFUR FLUORIDES
ARGON
BOLTZMANN EQUATION
DISTRIBUTION FUNCTIONS
ELECTRON-MOLECULE COLLISIONS
ELECTRONS
EMISSION SPECTRA
HELIUM
IONIZATION
NITROGEN
PLASMA
COLLISIONS
DIFFERENTIAL EQUATIONS
ELECTRIC DISCHARGES
ELECTRON COLLISIONS
ELEMENTARY PARTICLES
ELEMENTS
EQUATIONS
FERMIONS
FLUIDS
FLUORIDES
FLUORINE COMPOUNDS
FUNCTIONS
GASES
HALIDES
HALOGEN COMPOUNDS
LEPTONS
MOLECULE COLLISIONS
NONMETALS
PARTIAL DIFFERENTIAL EQUATIONS
RARE GASES
SPECTRA
SPECTROSCOPY
SULFUR COMPOUNDS
400301* - Organic Chemistry- Chemical & Physicochemical Properties- (-1987)
ORGANIC
PHYSICAL AND ANALYTICAL CHEMISTRY
OXYGEN
EMISSION SPECTROSCOPY
HIGH-FREQUENCY DISCHARGES
PLASMA DIAGNOSTICS
SULFUR FLUORIDES
ARGON
BOLTZMANN EQUATION
DISTRIBUTION FUNCTIONS
ELECTRON-MOLECULE COLLISIONS
ELECTRONS
EMISSION SPECTRA
HELIUM
IONIZATION
NITROGEN
PLASMA
COLLISIONS
DIFFERENTIAL EQUATIONS
ELECTRIC DISCHARGES
ELECTRON COLLISIONS
ELEMENTARY PARTICLES
ELEMENTS
EQUATIONS
FERMIONS
FLUIDS
FLUORIDES
FLUORINE COMPOUNDS
FUNCTIONS
GASES
HALIDES
HALOGEN COMPOUNDS
LEPTONS
MOLECULE COLLISIONS
NONMETALS
PARTIAL DIFFERENTIAL EQUATIONS
RARE GASES
SPECTRA
SPECTROSCOPY
SULFUR COMPOUNDS
400301* - Organic Chemistry- Chemical & Physicochemical Properties- (-1987)