Condenser optics, partial coherence, and imaging for soft-x-ray projection lithography

Journal Article · Wed Dec 01 00:00:00 EST 1993 · Applied Optics; (United States)

DOI:https://doi.org/10.1364/AO.32.006938· OSTI ID:5331655

Sommargren, G E; Seppala, L G ^[1]

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1. Lawrence Livermore National Laboratory, University of California, P.O. Box 808, Livermore, California 94550 (United States)

A condenser system couples the radiation source to an imaging system, controlling the uniformity and partial coherence at the object, which ultimately affects the characteristics of the aerial image. A soft-x-ray projection lithography system based on a ring-field imaging system and a laser-produced plasma x-ray source places considerable constraints on the design of a condenser system. Two designs are proposed, critical illumination and Koehler illumination, each of which requires three mirrors and scanning for covering the entire ring field with the required uniformity and partial coherence. Images based on Hopkins' formulation of partially coherent imaging are simulated.

• DOE Contract Number: W-7405-ENG-48
• OSTI ID: 5331655
• Journal Information: Applied Optics; (United States), Vol. 32:34; ISSN 0003-6935
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
SOFT X RADIATION
BEAM TRANSPORT
IMAGES
LASER-PRODUCED PLASMA
MASKING
MIRRORS
OPTICAL SYSTEMS
SPATIAL RESOLUTION
X-RAY SOURCES
ELECTROMAGNETIC RADIATION
EQUIPMENT
IONIZING RADIATIONS
PLASMA
RADIATION SOURCES
RADIATIONS
RESOLUTION
X RADIATION
X-RAY EQUIPMENT
440600* - Optical Instrumentation- (1990-)