In situ preparation of Y-Ba-Cu-O superconducting thin films by magnetron sputtering

Journal Article · Mon Mar 28 00:00:00 EST 1988 · Appl. Phys. Lett.; (United States)

DOI:https://doi.org/10.1063/1.99222· OSTI ID:5288604

Li, H C; Linker, G; Ratzel, F; Smithey, R; Geerk, J

Thin superconducting films of YBa/sub 2/ Cu/sub 3/ O/sub 7/ have been prepared by magnetron sputtering from targets of sintered material in an oxygen-argon atmosphere. The compositional and structural properties were studied by Rutherford backscattering and x-ray diffraction. The films were deposited at substrate temperatures between 580 and 800 /sup 0/C. It was found that the material grows in the oxygen deficient tetragonal phase. In situ heat treatment at 430 /sup 0/C in pure O/sub 2/ atmosphere generates the orthorhombic structure and the films on sapphire and SrTiO/sub 3/ coated sapphire substrates show the full superconducting transition at 83 K

• Research Organization: Kernforschungszentrum Karlsruhe, Institut fuer Nukleare Festkoerperphysik, P.O. Box 3640, D-7500 Karlsruhe, Federal Republic of Germany
• OSTI ID: 5288604
• Journal Information: Appl. Phys. Lett.; (United States), Vol. 52:13
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
BARIUM OXIDES
CHEMICAL COMPOSITION
CRYSTAL STRUCTURE
SPUTTERING
TRANSITION TEMPERATURE
COPPER OXIDES
STRONTIUM OXIDES
VAPOR DEPOSITED COATINGS
SUPERCONDUCTING FILMS
FABRICATION
TITANIUM OXIDES
YTTRIUM OXIDES
BACKSCATTERING
EXPERIMENTAL DATA
HEAT TREATMENTS
HIGH TEMPERATURE
SURFACE COATING
X-RAY DIFFRACTION
ALKALINE EARTH METAL COMPOUNDS
BARIUM COMPOUNDS
CHALCOGENIDES
COATINGS
COHERENT SCATTERING
COPPER COMPOUNDS
DATA
DEPOSITION
DIFFRACTION
FILMS
INFORMATION
NUMERICAL DATA
OXIDES
OXYGEN COMPOUNDS
PHYSICAL PROPERTIES
SCATTERING
STRONTIUM COMPOUNDS
THERMODYNAMIC PROPERTIES
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
YTTRIUM COMPOUNDS
360204* - Ceramics
Cermets
& Refractories- Physical Properties
656100 - Condensed Matter Physics- Superconductivity
360201 - Ceramics
Cermets
& Refractories- Preparation & Fabrication
360202 - Ceramics
Cermets
& Refractories- Structure & Phase Studies