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Title: Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia

Abstract

Thin films of titanium nitride were chemical vapor deposited on (100)-oriented single-crystal silicon substrates from tetrakis (dimethylamino) titanium, Ti((CH{sub 3}){sub 2}N){sub 4}, and ammonia gas mixtures in a cold-wall reactor at 623 K and 655 Pa. The films were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron spectroscopy. The nano-scale hardness of the film, measured by nanoindentation, was 12.7 {plus_minus} 0.6 GPa. The average kinetic friction coefficient against unlubricated, type 440C stainless steel was determined using a computer-controlled friction microprobe to be {approximately}0.43.

Authors:
; ; ; ;
Publication Date:
Research Org.:
Oak Ridge National Lab., TN (United States)
Sponsoring Org.:
USDOE, Washington, DC (United States); Oak Ridge Inst. for Science and Education, TN (United States)
OSTI Identifier:
52842
Report Number(s):
CONF-941144-127
ON: DE95010224; TRN: AHC29515%%113
DOE Contract Number:  
AC05-84OR21400
Resource Type:
Technical Report
Resource Relation:
Conference: Fall meeting of the Materials Research Society (MRS), Boston, MA (United States), 28 Nov - 9 Dec 1994; Other Information: PBD: [1994]
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; TITANIUM NITRIDES; CHEMICAL VAPOR DEPOSITION; MECHANICAL PROPERTIES; CHEMICAL REACTORS; MICROHARDNESS; WEAR RESISTANCE; EXPERIMENTAL DATA; PROTECTIVE COATINGS

Citation Formats

Bae, Y W, Lee, W Y, Besmann, T M, Blau, P J, and Riester, L. Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia. United States: N. p., 1994. Web.
Bae, Y W, Lee, W Y, Besmann, T M, Blau, P J, & Riester, L. Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia. United States.
Bae, Y W, Lee, W Y, Besmann, T M, Blau, P J, and Riester, L. Sat . "Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia". United States.
@article{osti_52842,
title = {Synthesis and selected micro-mechanical properties of titanium nitride thin films by the pyrolysis of tetrakis titanium in ammonia},
author = {Bae, Y W and Lee, W Y and Besmann, T M and Blau, P J and Riester, L},
abstractNote = {Thin films of titanium nitride were chemical vapor deposited on (100)-oriented single-crystal silicon substrates from tetrakis (dimethylamino) titanium, Ti((CH{sub 3}){sub 2}N){sub 4}, and ammonia gas mixtures in a cold-wall reactor at 623 K and 655 Pa. The films were characterized by Auger electron spectroscopy, X-ray diffraction, and transmission electron spectroscopy. The nano-scale hardness of the film, measured by nanoindentation, was 12.7 {plus_minus} 0.6 GPa. The average kinetic friction coefficient against unlubricated, type 440C stainless steel was determined using a computer-controlled friction microprobe to be {approximately}0.43.},
doi = {},
url = {https://www.osti.gov/biblio/52842}, journal = {},
number = ,
volume = ,
place = {United States},
year = {1994},
month = {12}
}

Technical Report:
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