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Title: Transversely magnetized microwave plasma in a rectangular waveguide under cutoff conditions

Journal Article · · Review of Scientific Instruments
DOI:https://doi.org/10.1063/1.1148241· OSTI ID:528213
;  [1]
  1. The Institute of Physical and Chemical Research (RIKEN), Hirosawa 2-1, Wako-shi, Saitama 351-01 (Japan)

A plasma has been produced in 0.1{endash}0.3 mTorr Ar inside a rectangular TE{sub 10} mode waveguide with a cross-sectional area (6.3 cm width {times} 4.2 cm height) much smaller than standard waveguides (12.4 cm width {times}5.6 cm height), using microwaves of 2.45 GHz and 100{endash}260 W of power. The characteristics of the plasma and the wave propagation have been studied for the perpendicularly launched waves (k{perpendicular}B) in the ordinary like (E{parallel}B) and extraordinary like (E{perpendicular}B) modes, where a magnetic field of about 1200 G is generated inside the waveguide by rectangular blocks of permanent SmCo magnets. The maximum electron density, as measured by a plane probe, in the E{parallel}B and E{perpendicular}B cases are 2{times}10{sup 10} and 3{times}10{sup 11}cm{sup {minus}3}, respectively, while the electron temperatures ranged between 3 and 11 eV. Experimental results obtained in the two cases are discussed and the particle trajectories are studied from a single particle theory. {copyright} {ital 1997 American Institute of Physics.}

OSTI ID:
528213
Journal Information:
Review of Scientific Instruments, Vol. 68, Issue 8; Other Information: PBD: Aug 1997
Country of Publication:
United States
Language:
English

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