Masked deposition techniques for achieving multilayer period variations required for short-wavelength (68-A) soft-x-ray imaging optics
- Center for X-ray Optics, Lawrence Berkeley Laboratory, University of California, Berkeley, California 94720 (United States)
Practical issues in the development of multilayer coatings for reflective imaging systems operating at [lambda] [approx] 68 A are discussed. The 1% bandpass of Ru/B[sub 4]C multilayers at this short wavelength imposes stringent tolerances with which the actual multilayer period variation across the curved surfaces must match the ideal period variation for a 20[times] demagnifying Schwarzschild objective. New deposition techniques that use masks to correct the period variation across the curved surfaces of each optic have been developed to ensure reflectance over the entire clear aperture. The narrow bandpass together with steep lateral period gradients and steeply curved surfaces requires improved metrology for an acceptable period variation to be obtained and the overlap of the reflectance peaks on the two mirrors to be verified.
- DOE Contract Number:
- AC03-76SF00098
- OSTI ID:
- 5236143
- Journal Information:
- Applied Optics; (United States), Vol. 32:34; ISSN 0003-6935
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
REFLECTIVE COATINGS
DEPOSITION
APERTURES
BORON CARBIDES
MASKING
RUTHENIUM
SOFT X RADIATION
SPUTTERING
BORON COMPOUNDS
CARBIDES
CARBON COMPOUNDS
COATINGS
ELECTROMAGNETIC RADIATION
ELEMENTS
IONIZING RADIATIONS
METALS
OPENINGS
PLATINUM METALS
RADIATIONS
TRANSITION ELEMENTS
X RADIATION
440600* - Optical Instrumentation- (1990-)