Workshop report and presentations from the Semiconductor Research Corporation-DOE Semiconductor Task Force workshop

Conference · Thu Jan 01 00:00:00 EST 1987

OSTI ID:5220670

The Semiconductor Research Roproation-DOE Semiconductor Task Force Workshop was held in Oak ridge, Tennessee, on November 2-3, 1987. The purpose was to provide aforum for representatives of the national laboratories, the Department of Energy, and the semiconductor industry to discuss capabilities of the national laboratories which could industry to discuss capabilities of the national laboratories which could contribute to the future competitiveness of the US semiconductor industry, to identify specific large and small projects at the national laboratories which would be of direct benefit to the semiconductor industry, and to find ways of implementing these projects. Numerous small projects were identified which would utilize unique capabilities of the national laboratories in advanced ion implantation, plasma processing (including electron cyclotron resonance plasmas), ion and cluster beam deposition, materials characterization, electronic packaging, and laser processing and deposition. Five large-scale candidate projects were identified in synchrotron x-ray lithography, silicon process integration, advanced materials processing science, process analysis and diagnostics, and ultra clean room engineering. The major obstacle to implementing these projects is the lack of appropriate funds to initiate and stimulate interactions between the national laboratories and the semiconductor industry. SEMATECH and the federal government are potential sources of seed funds for these projects. The Semiconductor Research Corporation is ideally suited to interface the semiconductor industry and the national laboratories for many of these interactions.

• Research Organization: Oak Ridge National Lab., TN (USA)
• DOE Contract Number: AC05-84OR21400
• OSTI ID: 5220670
• Report Number(s): CONF-8711158-; ON: DE88007690
• Resource Relation: Conference: Semiconductor Research Corporation/DOE Semiconductor Task Force workshop, Oak Ridge, TN, USA, 2 Nov 1987
• Country of Publication: United States
• Language: English

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36 MATERIALS SCIENCE
29 ENERGY PLANNING
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