Electrically triggered 200 kV rail-gap switch for wide aperture excimer lasers

Journal Article · Thu Mar 01 00:00:00 EST 1984 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.333220· OSTI ID:5220571

Endoh, A; Watanabe, S; Watanabe, M

A wide aperture (7 x 7 cm/sup 2/), high output energy (5 J in KrF and 13.8 J in XeC1), UV preionized excimer laser is described. A self-breakdown rail gap was employed as an output switch with the maximum voltage and current up to 230 kV and 300 kA, respectively. To solve the switching jitter problem associated with the self-breakdown, an electrical triggering was investigated. The measured minimum switching time delay and gap closing time were 40 and 10 ns, respectively. The number of channels up to 50 was observed with a uniform distribution over the 80-cm electrode length. The triggering jitter was measured to be less than a nanosecond. The maximum operation voltage of the triggered rail gap was 200 kV. The successful trigger operation was obtained in the range 30%--98% of the self-breakdown voltage.

• Research Organization: The Institute for Solid State Physics, University of Tokyo, Tokyo, Japan
• OSTI ID: 5220571
• Journal Information: J. Appl. Phys.; (United States), Vol. 55:5
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
GAS LASERS
DESIGN
OPERATION
SWITCHES
TRIGGER CIRCUITS
AMPLIFIERS
APERTURES
BREAKDOWN
ELECTRIC CURRENTS
ELECTRIC POTENTIAL
ENERGY
PERFORMANCE
SPARK GAPS
TIME DELAY
CURRENTS
ELECTRICAL EQUIPMENT
ELECTRONIC CIRCUITS
ELECTRONIC EQUIPMENT
EQUIPMENT
LASERS
OPENINGS
PULSE CIRCUITS
420300* - Engineering- Lasers- (-1989)