Laser heterodyne surface profiler
A method and apparatus are disclosed for testing the deviation of the face of an object from a flat smooth surface using a beam of coherent light of two plane-polarized components, one of a frequency constantly greater than the other by a fixed amount to produce a difference frequency with a constant phase to be used as a reference, and splitting the beam into its two components. The separate components are directed onto spaced apart points on the face of the object to be tested for smoothness while the face of the object is rotated on an axis normal to one point, thereby passing the other component over a circular track on the face of the object. The two components are recombined after reflection to produce a reflected frequency difference of a phase proportional to the difference in path length of one component reflected from one point to the other component reflected from the other point. The phase of the reflected frequency difference is compared with the reference phase to produce a signal proportional to the deviation of the height of the surface along the circular track with respect to the fixed point at the center, thereby to produce a signal that is plotted as a profile of the surface along the circular track. The phase detector includes a quarter-wave plate to convert the components of the reference beam into circularly polarized components, a half-wave plate to shift the phase of the circularly polarized components, and a polarizer to produce a signal of a shifted phase for comparison with the phase of the frequency difference of the reflected components detected through a second polarizer. Rotation of the half-wave plate can be used for phase adjustment over a full 360/sup 0/ range.
- DOE Contract Number:
- W-7405-ENG-48
- Assignee:
- Dept. of Energy
- Application Number:
- ON: DE82016667
- OSTI ID:
- 5190607
- Country of Publication:
- United States
- Language:
- English
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Laser heterodyne surface profiler
Laser heterodyne surface profiler