Pyroelectric linear array infrared sensors made of c-axis-oriented La-modified PbTiO/sub 3/ thin films

Journal Article · Wed Jun 15 00:00:00 EDT 1988 · J. Appl. Phys.; (United States)

DOI:https://doi.org/10.1063/1.340276· OSTI ID:5185733

Takayama, R; Tomita, Y; Iijima, K; Ueda, I

High sensitive pyroelectric linear array infrared sensors have been fabricated by using highly c-axis-oriented and spontaneous polarized La-modified PbTiO/sub 3/ (PLT) thin films. The PLT thin films were deposited on (100)-oriented Pt thin film on (100)-cleaved MgO single crystals by rf magnetron sputtering. The PLT thin films have high figures of merit for voltage responsivity (R/sub v/) and specific detectivity (D*) without a poling treatment. Two types of linear array sensors, reticulated and nonreticulated ones, were fabricated. The reticulated and nonreticulated sensors have 64 elements with 200-..mu..m pitch and 128 elements with 100-..mu..m pitch, respectively. Ni-Cr electrodes of approximate area 1.9 x 10/sup -4/ or 3.0 x 10/sup -4/ cm/sup 2/ were deposited by vacuum evaporation on the PLT thin films with a thickness of 3--4 ..mu..m. Pyroelectric coefficients and their uniformity increased upon decreasing the deposition area of an element. Therefore, the elements of reticulated sensors have considerably larger R/sub v/ and D* compared with the nonreticulated ones. The nonreticulated sensors have a very high resolution of 10 elementsmm, a large R/sub v/ of 900 VW at 100 Hz, and a high D* (500 K, 100, 1) of 1.5 x 10/sup 8/ cm Hz/sup 12/W. Furthermore, the reticulated ones have a very large R/sub v/ of 2200 VW, a remarkably high D* of 6 x 10/sup 8/ cm Hz/sup 12/W, and a very low thermal cross talk of <3% at 100 Hz

• Research Organization: Basic Materials Group, Central Research Laboratories, Matsushita Electric Industrial Co., Ltd., Moriguchi, Osaka 570, Japan
• OSTI ID: 5185733
• Journal Information: J. Appl. Phys.; (United States), Vol. 63:12
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
INFRARED SPECTROMETERS
FABRICATION
LEAD OXIDES
DEPOSITION
PYROELECTRIC EFFECT
MAGNESIUM OXIDES
SURFACE COATING
PLATINUM
TITANIUM OXIDES
SPUTTERING
THIN FILMS
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
ELEMENTS
FILMS
LEAD COMPOUNDS
MAGNESIUM COMPOUNDS
MEASURING INSTRUMENTS
METALS
OXIDES
OXYGEN COMPOUNDS
PLATINUM METALS
SPECTROMETERS
TITANIUM COMPOUNDS
TRANSITION ELEMENT COMPOUNDS
TRANSITION ELEMENTS
360204* - Ceramics
Cermets
&amp; Refractories- Physical Properties