A low-temperature atomic force/scanning tunneling microscope for ultrahigh vacuum

Journal Article · · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States)

DOI:https://doi.org/10.1116/1.585441· OSTI ID:5180579

Giessibl, F J; Gerber, C; Binnig, G ^[1]

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1. Univ. Muenchen (Germany)

As described in this paper, the authors have built an ultrahigh vacuum atomic force/scanning tunneling microscope that works at 4.2 K. The microscope is incorporated into a very small chamber (100 ml) which can be evacuated and baked to ultrahigh vacuum (UHV) within a few hours by a specially designed value. The instrument is about 20x20x70 mm{sup 3} in size and sturdy enough to operate without vibration isolation. The deflection of a microfabricated cantilever is detected by electron tunneling. Preliminary results show atomic resolution of highly oriented pyrolytic graphite (HOPG) in the scanning tunneling microscope (STM) mode and steps in KBr that range from one to four lattice constants in height at UHV conditions and 4.2 K.

• OSTI ID: 5180579
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena; (United States), Vol. 9:2; ISSN 0734-211X
• Country of Publication: United States
• Language: English

Related Subjects

47 OTHER INSTRUMENTATION
MICROSCOPES
DESIGN
GRAPHITE
MICROSCOPY
POTASSIUM BROMIDES
TEMPERATURE RANGE 0000-0013 K
TUNNELING
ULTRAHIGH VACUUM
ALKALI METAL COMPOUNDS
BROMIDES
BROMINE COMPOUNDS
CARBON
ELEMENTAL MINERALS
ELEMENTS
HALIDES
HALOGEN COMPOUNDS
MINERALS
NONMETALS
POTASSIUM COMPOUNDS
TEMPERATURE RANGE
440800* - Miscellaneous Instrumentation- (1990-)