Deposition of diamond-like carbon film using electron cyclotron resonance plasma
Journal Article
·
· Applied Physics Letters; (United States)
- Weber Research Institute, Polytechnic University, Farmingdale, New York (USA)
- Moltech Corp., Chemistry Department, SUNY at Stony Brook, Stony Brook, New York (USA)
Hard diamond-like carbon films were deposited on Si(100) substrates using a CH{sub 4} plasma created through electron cyclotron resonance (ECR) heating. The ECR plasma was excited by a Lisitano coil. These films could be deposited with a negative dc bias ({minus}200 V) or a rf-induced negative self-bias ({minus}100 V) on the substrates. The deposition rate of the film was about 2.3 A/s. The deposited films were characterized by Raman spectroscopy and near-edge x-ray absorption fine structure analysis.
- OSTI ID:
- 5160212
- Journal Information:
- Applied Physics Letters; (United States), Vol. 59:20; ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
DIAMONDS
AMORPHOUS STATE
CHEMICAL VAPOR DEPOSITION
ABSORPTION SPECTROSCOPY
ECR HEATING
PLASMA
RAMAN SPECTROSCOPY
CARBON
CHEMICAL COATING
DEPOSITION
ELEMENTAL MINERALS
ELEMENTS
HEATING
HIGH-FREQUENCY HEATING
LASER SPECTROSCOPY
MINERALS
NONMETALS
PLASMA HEATING
SPECTROSCOPY
SURFACE COATING
360601* - Other Materials- Preparation & Manufacture
DIAMONDS
AMORPHOUS STATE
CHEMICAL VAPOR DEPOSITION
ABSORPTION SPECTROSCOPY
ECR HEATING
PLASMA
RAMAN SPECTROSCOPY
CARBON
CHEMICAL COATING
DEPOSITION
ELEMENTAL MINERALS
ELEMENTS
HEATING
HIGH-FREQUENCY HEATING
LASER SPECTROSCOPY
MINERALS
NONMETALS
PLASMA HEATING
SPECTROSCOPY
SURFACE COATING
360601* - Other Materials- Preparation & Manufacture